Alignment stage

Abstract

In an alignment stage, a top table 4a, which holds a work piece on which a moving load acts, is disposed above a base 1, and a supporting unit 13 each having three degrees of freedom of X, Y, and θ and driving units 14A, 14B, 14C, and 14D, each having a one-axis direction ball screw linear motion mechanism 9 in addition to the same configuration as that of the supporting unit 13, are interposed between the base 1 and the top table 4a to be disposed at locations corresponding to the center and four corner portions of the top table 4a, which are disposed in a zigzag fashion in a load movement direction L. The ball screw linear motion mechanisms 9 of the driving units 14A and 14B of diagonal positions on one side and the ball screw linear motion mechanisms 9 of the driving units 14C and 14D of diagonal positions on the other side are disposed to be at right angles to each other. A moving load which acts on the top table 4a through a work piece while moving in the load movement direction L is continuously received by the respective driving units 14A and 14C, the supporting unit 13, and the respective driving units 14B and 14D, so that deformation of the top table 4a is suppressed.

Description

technical field [0001] The present invention relates to an alignment table, and more particularly to an alignment table provided with three degrees of freedom of X, Y, and θ for aligning a workpiece receiving a moving load. [0002] This application claims priority based on Japanese Patent Application No. 2009-126034 for which it applied in Japan on May 26, 2009, and uses the content here. Background technique [0003] In recent years, as a method of forming electrode patterns (conductive patterns) such as liquid crystal displays on required substrates, printing techniques using conductive pastes as printing inks, For example, a method of printing and forming an electrode pattern on a substrate using a gravure offset printing technique (for example, refer to Patent Document 1 and Patent Document 2). [0004] When offset printing a fine printing pattern such as the above-mentioned electrode pattern on a flat plate-shaped printing object such as the above-mentioned substrate,...

AI Technical Summary

Problems solved by technology

Therefore, thermal deformation may occur on the table 4 and the base 1 due to the influence of heat generated by each servo motor 10, and the unillustrated parts held on the table 4 may be caused by the thermal deformation of the table 4 or the base 1. A positional deviation occurs on the workpiece

[0027] In this way, in Figure 8 and Figure 9 In the conventional alignment table shown above, it is difficult to hold the workpiece on which a moving load is applied in a state where high-precision positioning is performed in the three-axis directions of X, Y, and θ, or to hold the workpiece in a state where a moving load is applied. High-precision position correction in the 3-axis directions of X, Y, and θ

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