Unlock instant, AI-driven research and patent intelligence for your innovation.

Shield member, components thereof and substrate mounting table comprising shield member

A technology of shielding parts and parts, which is applied in the field of substrate mounting table, can solve the problems such as easy damage of ring components, and achieve the effect of preventing abnormal discharge or corrosion

Active Publication Date: 2014-02-26
TOKYO ELECTRON LTD
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the other hand, in order to prevent deformation due to thermal expansion, when the fastening force of the fixing screws that fix the ring component to the base material of the lower electrode is increased, when there is fastening to the base material of the lower electrode or thermal expansion, the ring structure The problem of easy breakage of parts

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Shield member, components thereof and substrate mounting table comprising shield member
  • Shield member, components thereof and substrate mounting table comprising shield member
  • Shield member, components thereof and substrate mounting table comprising shield member

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0061] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0062] figure 1 It is a cross-sectional view showing a schematic configuration of a substrate processing apparatus having a substrate mounting table to which a shielding member is applied according to the first embodiment of the present invention. This substrate processing apparatus performs predetermined plasma processing on a glass substrate for manufacturing a liquid crystal display device (LCD), for example.

[0063] exist figure 1 Among them, the substrate processing apparatus 10 has a processing chamber (chamber) 11 for accommodating, for example, a rectangular glass substrate G (hereinafter simply referred to as "substrate") having a side of several meters. A stage (base) 12 on which the substrate G is placed. The susceptor 12 is constituted by, for example, a base material 13 formed of anodized aluminum or stainless steel, and the base material 13 is suppor...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a shield member generating no gap with a lower part electrode even heat expansion happens and capable of preventing abnormal electrical discharge and generation of corrosion of the lower part electrode, and components thereof and a substrate mounting table comprising the shield member. The shield member comprises an insulating long object disposed along one side of a rectangular carrying surface of the lower part electrode and is provided with a screw hole for fixation disposed at one end of the length direction and components of the screw holes for bearing in an apart arrangement in the length direction of the long object, combination is formed in modes that the end surface at one end of the length direction of each annular component is in a butt joint with the side surface at one end of the length direction of other adjacent annular components, and the side surface at the other end is in a butt joint with the side surface at one end of other annular components different from the other adjacent annular components.

Description

technical field [0001] The present invention relates to a shielding member suitable for a substrate mounting table for mounting a substrate in a processing chamber of a substrate processing apparatus, components thereof, and a substrate mounting table having the shielding member. Background technique [0002] In the manufacturing process of FPD (Flat Panel Display: Flat Panel Display) including a liquid crystal display device (LCD), there is known a substrate processing apparatus that performs plasma processing on various substrates including a glass substrate. [0003] In such a substrate processing apparatus, there is a substrate stage supporting a substrate in a processing chamber (hereinafter referred to as a "chamber"); and an upper electrode arranged to face the substrate stage with a processing interval therebetween A high-frequency power (RF) for generating plasma is applied to the substrate stage functioning as the lower electrode, and a processing gas is introduced...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/04C23C16/458C23C16/50
CPCH01J37/32651H01L21/6833
Inventor 佐佐木芳彦南雅人
Owner TOKYO ELECTRON LTD