3results about How to "Prevent abnormal discharge" patented technology

The utility model provides a kind of radio frequency connector and the processing equipment of semiconductor device.The radio frequency connector includes socket and at least one spring.The socket includes the socket of accommodating radio frequency rod, wherein the inner wall of the socket is made of conductive material.The at least one spring is made of conductive material, and includes multiple radial arrangement elastic ring, wherein each the elastic ring is distributed along its circumferential direction in the socket, and respectively elastically contacts the inner wall of the radio frequency rod and the socket.

The present application relates to air purification equipment technical field, disclose a kind of carbon fiber spiral electrode, plasma generating device and air purifier.The carbon fiber spiral electrode includes: spiral electrode, including carbon fiber bundle and the burr suppression structure being wound or wrapped in the outer periphery of carbon fiber bundle, spiral electrode is suitable for grounding;Inner electrode, inner electrode is wrapped with insulating layer, spiral electrode is spirally wound in the outer periphery of insulating layer, inner electrode is suitable for connecting alternating current power supply high voltage end.The carbon fiber spiral electrode of the present application can not only constrain carbon fiber bundle into bundle, effectively reduce the width of carbon fiber bundle, avoid carbon fiber bundle to be laid in insulating layer outside to lead to occupy the discharge area of carbon fiber spiral electrode, can effectively improve discharge effect.At the same time, since the burr suppression structure is wound in the outer periphery of carbon fiber bundle, it also will not pass through the surface of insulating layer to lead to occupy the discharge area of carbon fiber spiral electrode, which further improves the discharge effect of carbon fiber spiral electrode.