Aluminum-scandium alloy target blank, and preparation method and application thereof

An alloy target and aluminum-scandium technology, applied in the field of aluminum-scandium alloys, can solve the problems affecting the use effect of scandium-aluminum alloy target blanks, the segregation of aluminum-scandium alloy ingots, affecting the use effect of target materials, etc., so as to achieve uniform microstructure and agglomerates. Less, the effect of stable product performance

Inactive Publication Date: 2019-01-22
有研新材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The melting point of metal scandium is 1541°C, and its chemical properties are active, which is quite different from the melting point of aluminum at 660°C. The aluminum-scandium alloy ingots prepared by the commonly used intermediate frequency induction melting casting method have serious segregation, and the mass percentage of scandium can only reach 0.05-2%. , the secondary precipitates are dendritic and relatively coarse, which seriously affects the use effect of scandium-aluminum alloy target blanks
Patent CN201610677045.1 provides a method for preparing aluminum-scandium alloy with high scandium content. The mass percentage of scandium can reach 55-70%. However, the vacuum powder sintering process has the problems of high oxygen content and low density, which affects the target Material use effect

Method used

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  • Aluminum-scandium alloy target blank, and preparation method and application thereof
  • Aluminum-scandium alloy target blank, and preparation method and application thereof
  • Aluminum-scandium alloy target blank, and preparation method and application thereof

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Experimental program
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Effect test

Embodiment 1

[0028] The smelting equipment adopts a 10kg vacuum suspension furnace, and the induction power supply is a real-time dual output power supply of 8kHz intermediate frequency and 200kHz high frequency.

[0029] According to the composition ratio of aluminum-scandium alloy, weigh 500g of metal scandium (purity is 99.98%), metal aluminum ingot 5700g (purity is 99.995%), then place the metal aluminum on the bottom of the water-cooled copper crucible, and then place the metal scandium on the metal On the aluminum block; close the furnace cover and vacuumize. When the vacuum reaches 0.5Pa, close the vacuum pumping valve, fill in high-purity argon to 0.07MPa, and close the argon valve; then open the vacuum valve and pump to 0.1Pa. , continue to fill with argon to 0.07MPa, start to heat up, gradually increase the power to the melting temperature of 1060°C, keep it at this temperature for 10 minutes, then reduce the power to make the molten metal temperature 970°C, set the output time of...

Embodiment 2

[0031] The smelting equipment adopts a 10kg vacuum suspension furnace, and the induction power supply is a real-time dual output power supply of 8kHz intermediate frequency and 200kHz high frequency.

[0032] According to the composition ratio of aluminum-scandium alloy, weigh 1500g metal scandium (purity is 99.98%), metal aluminum ingot 5000g (purity is 99.995%), then put the metal aluminum on the bottom of the water-cooled copper crucible, and then place the metal scandium on the metal On the aluminum block; close the furnace cover and vacuumize. When the vacuum reaches 0.06Pa, close the vacuum pumping valve, fill in high-purity argon to 0.07MPa, and close the argon valve; then open the vacuum pumping valve and vacuumize to 0.2Pa. , continue to fill with argon to 0.06MPa, start to heat up, gradually increase the power to the melting temperature of 1330°C, keep it at this temperature for 15 minutes, then reduce the power so that the temperature of the molten metal is 1220°C, s...

Embodiment 3

[0034] The smelting equipment adopts a 10kg vacuum suspension furnace, and the induction power supply is a real-time dual output power supply of 8kHz intermediate frequency and 200kHz high frequency.

[0035] According to the composition ratio of aluminum-scandium alloy, weigh 545g of scandium-containing master alloy with a stoichiometric ratio of Al-87Sc, and 5650g of metal aluminum ingot (purity is 99.995%), then place the metal aluminum on the bottom of the water-cooled copper crucible, and then put the aluminum Put the scandium master alloy on the metal aluminum block; close the furnace cover and vacuumize, when the vacuum reaches 0.5Pa, close the vacuum valve, fill high-purity argon to 0.07MPa, close the argon valve; then open the vacuum valve , evacuate to 0.1Pa, continue to fill with argon gas to 0.07MPa, start to heat up, gradually increase the power to the melting temperature of 1060°C, keep it at this temperature for 20min, reduce the power so that the temperature of ...

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Abstract

The invention discloses an aluminum-scandium alloy target blank, and a preparation method and an application thereof, and belongs to the technical field of aluminum-scandium alloys. The aluminum-scandium alloy target blank prepared by combination of cold crucible levitation melting and variable-frequency electromagnetic stirring has an oxygen content of below 100 ppm and a total aluminum and scandium element content of 99.95 mass%, and has a high purity and a low oxygen content, so later high-quality film formation is facilitated; the volume percentage of a secondary precipitated phase in thealuminum-scandium alloy target blank is 5-25%, the average size is 20-45 [mu]m, and the blank has polygonal and nearly spherical shapes, a uniform microstructure and a significantly improved density,so micro-cracks and other internal defects in the ingot casting and deformation processing processes are effectively avoided, and the quality and yield of a target are significantly improved.

Description

technical field [0001] The invention belongs to the technical field of aluminum-scandium alloys, and in particular relates to an aluminum-scandium alloy target blank and a preparation method and application thereof. Background technique [0002] ScAlN piezoelectric thin films have the advantages of high acoustic wave velocity, high thermal conductivity, low dielectric loss, excellent thermal stability, and compatibility with complementary metal oxide semiconductor (CMOS) processes. Ideal material for components. With the rapid development of science and technology, and the emphasis of various countries on the research of key materials used in key fields, the demand for aluminum-scandium alloy target blanks as the key materials required for the preparation of ScAlN piezoelectric films is increasing day by day. [0003] The scandium content and microstructure of aluminum-scandium alloy target blanks are important factors affecting the performance of ScAlN piezoelectric thin f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C22C1/02C22C1/03
CPCC22C1/026C22C1/03C23C14/3407C23C14/3414
Inventor 陈德宏吴道高何金江钟嘉珉闫缓庞思明张小伟苗睿瑛杨宏博杨秉政
Owner 有研新材料股份有限公司
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