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MEMS devices

A device and electrode structure technology, applied in the field of MEMS devices, can solve problems such as disconnection switch failure

Active Publication Date: 2014-04-30
NXP BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0011] In some cases another issue is relevant, namely the voltage V at the switch release release Typically low, when RF power is across the switch it will cause the disconnect switch to fail

Method used

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  • MEMS devices
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Embodiment Construction

[0048] The same reference numerals are used in different figures to designate the same elements.

[0049] The present invention provides a MEMS device, wherein at least one of the opposing faces of the electrode structure has a non-planar surface including at least one wave peak and at least one wave valley. The height of the peaks and the depth of the troughs are between 0.01t and 0.1t, where t is the thickness of the movable electrode film. This undulation means that the movable electrode gradually decelerates as the switch closes.

[0050] figure 2 Various possible configurations are shown. figure 2 (a) shows a known structure of substrate 20 , stationary lower electrode 22 , dielectric layer 24 , air gap 26 and movable upper electrode 28 .

[0051] According to the invention, at least one of said two electrode structures (including any dielectric layer in contact with said electrodes) is uneven, ie undulating.

[0052] figure 2 (b) shows the undulating top electrode ...

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Abstract

A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.

Description

technical field [0001] The present invention relates to MEMS (Micro Electro Mechanical Systems) devices. Background technique [0002] MEMS technology is increasingly being used in electronic devices. Switches and adjustable capacitors are examples of circuit components that can be fabricated using MEMS technology. [0003] MEMS switches can be used in a variety of applications requiring high speed, typically low current switching in circuits. MEMS switches have the advantage of a large capacitive switching range. [0004] MEMS capacitors can also be used in various circuits such as tunable filters, tunable phase shifters, and tunable antennas. One application of increasing interest is in radio frequency (RF) and microwave communication systems, for example for low-cost reconfigurable / tunable antennas. [0005] for example, figure 1 A MEMS capacitor with electrically tunable dielectric and MEMS controlled dielectric spacing is shown. The dielectric spacing is controlle...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B3/00
CPCB81B2201/014H01G5/16H01G5/011B81B2201/016B81B3/0078Y10T29/49105
Inventor 马丁·古森思希尔柯·瑟伊皮特·杰勒德·斯蒂内肯约瑟夫·托马斯·马丁内斯·范贝克
Owner NXP BV