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Rotation angle detector

A technology of rotation angle and detector, applied in the direction of converting sensor output, instrument, measuring device, etc., can solve the problem of increasing chip size and so on

Inactive Publication Date: 2012-02-08
DENSO CORP
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  • Claims
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Problems solved by technology

Then, since the electrical angle is doubled to remove the induced noise, the scale of the chip is greatly increased

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no. 1 example

[0027] figure 1 A plan view of the rotation angle detector according to the first embodiment is shown. figure 2 shows along the figure 1 Cross-sectional view of the detector taken by line II-II. image 3 The electrical connections between the magnetic field detection element, the operating element and the calculator are shown. Figure 4 A plan view showing the relationship between the sensor chip and the magnet rotor. The rotation direction of the magnet rotor 10 is defined as the rotation direction. A direction along the thickness of the semiconductor substrate 31 is defined as a thickness direction. A direction perpendicular to the thickness direction and the rotation direction and passing through the magnet rotor center O is defined as a normal direction.

[0028] The probe 100 mainly includes a magnet rotor 10 , a sensor chip 30 , an operating element 50 and a calculator 70 . Such as figure 1 and 2 As shown, a winding 20 for generating a magnetic field surrounds the...

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Abstract

A rotation angle detector for detecting a rotation angle of a magnet rotator includes: the rotator with a magnet mounted on a rotation shaft; a sensor chip; and an operation element. The chip includes: first and second normal component detection elements for detecting a magnetic field along with a normal direction and first and second rotation component detection elements for detecting a magnetic field along with a rotation direction. A phase difference [Delta][theta], output signals S1, S2, C1, C2 of the detection elements, a value [Delta][theta]bR obtained by differentiating a component of the magnetic field along with the normal direction with respect to the rotation direction, and a value [Delta][theta]b[theta] obtained by differentiating a component of the magnetic field along with the rotation direction with respect to the rotation direction satisfies: S 1 - S 2 [Delta][theta] PRG = [Delta] [theta]  b R and C 1 - C 2 [Delta][theta] PRG = [Delta] [theta]  b [theta] The operation element calculates: C 1 + [alpha]   S 1 - S 2 [Delta][theta] and S 1 - [beta]   C 1 - C 2 [Delta][theta]

Description

technical field [0001] The invention relates to a rotation angle detector comprising a magnet rotor with a pair of magnetic poles and a sensor chip with a magnetic field detection element on a semiconductor substrate. Background technique [0002] Conventionally, as described in Japanese Patent No. 4273363 corresponding to US-2009 / 0206827, a rotation angle detector includes a magnet rotor having four or more magnetic poles (ie, two or more pairs of magnetic poles), and First and second sensing means for detecting the direction of the magnetic flux generated by the magnet rotor. [0003] Each of the first and second sensing devices is a spin valve type giant magnetoresistance effect element having a fixed layer and a variable layer. The magnetization direction of the pinned layer is fixed to a specific direction. The magnetization direction of the variable layer changes with the direction of the magnetic field. The giant magnetoresistance effect element has a characteristi...

Claims

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Application Information

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IPC IPC(8): G01D5/14
CPCG01B7/30G01D5/145
Inventor 原田智之
Owner DENSO CORP
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