Rotation angle detector
A technology of rotation angle and detector, applied in the direction of converting sensor output, instrument, measuring device, etc., can solve the problem of increasing chip size and so on
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[0027] figure 1 A plan view of the rotation angle detector according to the first embodiment is shown. figure 2 shows along the figure 1 Cross-sectional view of the detector taken by line II-II. image 3 The electrical connections between the magnetic field detection element, the operating element and the calculator are shown. Figure 4 A plan view showing the relationship between the sensor chip and the magnet rotor. The rotation direction of the magnet rotor 10 is defined as the rotation direction. A direction along the thickness of the semiconductor substrate 31 is defined as a thickness direction. A direction perpendicular to the thickness direction and the rotation direction and passing through the magnet rotor center O is defined as a normal direction.
[0028] The probe 100 mainly includes a magnet rotor 10 , a sensor chip 30 , an operating element 50 and a calculator 70 . Such as figure 1 with 2 As shown, a winding 20 for generating a magnetic field surrounds th...
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