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Illuminating device and illuminating method

A technology of light irradiation device and light injection, which is applied in the direction of photolithography exposure device, microlithography exposure equipment, polarizing element, etc., can solve the problem of difficult formation of a liquid crystal polymer layer 93 with a faithful and high resolution, and achieve analysis high resolution effect

Inactive Publication Date: 2015-01-28
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, if Figure 22 As shown, part of the light passing through the light-transmitting portion 97 of the mask 95 is incident obliquely to the mask 95 in the direction of its surface, and is incident on the light-shielding portion 96 of the photopolymerizable liquid crystal material layer 92 as the object to be irradiated. As a result, it is difficult to form the liquid crystal polymer layer 93 with a faithful and high-resolution pattern in the pattern of the mask 95.

Method used

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  • Illuminating device and illuminating method
  • Illuminating device and illuminating method

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no. 1 approach

[0115] figure 1 It is a perspective view showing the outline of the configuration of the light irradiation device according to the first embodiment, figure 2 will be figure 1 A side sectional view of the shown light irradiation device cut by line A-A, image 3 will be figure 1 The shown light irradiation device is a top sectional view cut along line B-B.

[0116] The light irradiation device according to the first embodiment is a device for manufacturing, for example, a patterned retardation film. 10: Concentrate the light from the light emitting part 10 into a linear light concentrating member 20 extending in one direction in which the light source elements 12 described later are arranged; shape the light from the light concentrating member 20 into a strip shape a mask 30 ; and a transport member 40 for transporting the object W to be irradiated.

[0117] In the light source element row 11 constituting the light emitting portion 10, as Figure 4 As shown, each of th...

no. 2 approach

[0135] Figure 9 It is a side sectional view showing the outline of the structure of the light irradiation apparatus concerning 2nd Embodiment.

[0136] The light irradiation device related to the second embodiment is used to manufacture, for example, a patterned retardation film, and the structure of the device includes: a light emitting part 10 having a light source element row 11 composed of a plurality of, for example, three or more light source elements 12; The light from the light emitting part 10 is condensed into a linear light condensing member 20 extending in one direction (x direction) in which light source elements 12 described later are arranged; a mask 30 ; and a transport member 40 for transporting the object W to be irradiated. Here, the mask 30 and the transport member 40 have the same configuration as the mask 30 and the transport member 40 of the light irradiation device according to the first embodiment.

[0137] In the light source element row 11 constit...

no. 3 approach

[0145] Figure 10 It is a side sectional view showing the outline of the structure of the light irradiation apparatus which concerns on 3rd Embodiment.

[0146] The light irradiation device according to the third embodiment is a device for manufacturing, for example, a patterned retardation film, and the configuration of the device includes: a light emitting part having a light source element row 11 composed of a plurality of, for example, three or more light source elements 12 10: Concentrate the light from the light emitting part 10 into a linear light concentrating member 20 extending in one direction (x direction) in which the light source elements 12 described later are arranged; shape the light from the light concentrating member 20 A belt-shaped mask 30 ; and a transport member 40 for transporting the object W to be irradiated. Here, the mask 30 and the transport member 40 have the same configuration as the mask 30 and the transport member 40 of the light irradiation dev...

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Abstract

PROBLEM TO BE SOLVED: To provide a light irradiation device and a light irradiation method capable of forming a pattern faithful to the pattern of a mask and with high resolution.SOLUTION: The light irradiation device includes: a light emission part having a light source element array in which a plurality of light source elements composed of a short arc type discharging lamp and a reflector reflecting light from the discharging lamp and arranged so as to surround the discharging lamp are arranged adjacent to one another in one direction; and a mask in which a lot of linear light shielding parts and a lot of translucent parts respectively extending in a direction perpendicular to the one direction are arranged so as to be alternately adjacent in the one direction. An irradiation object is irradiated, via the mask, with the light from the light emission part.

Description

technical field [0001] The present invention relates to a light irradiation device and a light irradiation method for forming a linear pattern, and more particularly, to a suitable light irradiation device for irradiating a photopolymerizable liquid crystal material or a photoalignment film in a manufacturing process of, for example, a patterned retardation film. Light irradiation device and light irradiation method. Background technique [0002] A 3D video display device is a device that displays three-dimensional stereoscopic images. As such a 3D video display device, devices for theaters and TV projections have been developed in the past, and are expected to be used in entertainment facilities, store displays, and medical treatment in the future. Therefore, attention in recent years. [0003] Figure 20 It is an explanatory diagram showing an outline of the configuration of an example of a 3D video display device. The structure of this 3D video display device includes: ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G02B5/30
Inventor 仲田重范川村直树
Owner USHIO DENKI KK
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