AC Hall system

Abstract

The invention relates to an AC Hall system for detecting the magnetic field. The system comprises a sinusoidal wave generation circuit (1), a comparator (2), an isolating transformer (3), a load current sampling circuit (4), a Hall sample (5), a linear correction circuit (6), a keyboard switch switching circuit (7), an isolating transformer (8), a sampling amplifying circuit (9), an absolute value amplifying circuit (10) and an output amplifying circuit (11). In the system, constant AC signals are injected into two input electrodes of a Hall device, response of the Hall sample (5) to the magnetic field is output in a manner of AC, and the isolating transformer (3) and the isolating transformer (8) can effectively isolate parasitic DC potential and prevent output drift. The Hall system has the characteristics of having strong anti-interference capability and high detection precision, being convenient to debug, and the like.

Description

technical field [0001] The invention relates to a Hall system for detecting magnetic fields, in particular to an AC Hall system in an ion implanter for manufacturing semiconductor devices. Background technique [0002] With the increasing integration of semiconductor devices, the wafer size is getting bigger and bigger, and the unit device size is getting smaller and smaller, which puts forward higher requirements for various semiconductor process equipment. Ion implanter is one of the key equipments in the semiconductor ion doping process line, the smaller and smaller the size of the unit device, the more stringent the stability and purity of the beam during the wafer implantation and doping process. [0003] In order to obtain the required ion beam, a variety of steady current power supplies are used, such as source filter magnet power supply, mass analyzer power supply, parallel beam lens power supply, and the large current output of these power supplies are all connected...

AI Technical Summary

Problems solved by technology

However, due to the rectification effect formed by the two pairs of electrodes of the Hall sheet not in complete contact with the semiconductor sheet, as well as the parasitic DC potential generated by the temperature difference caused by the different solder joints of the two Hall electrodes and the different heat capacities

It varies with time, causing the output to drift

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