Method for bonding optical substrate and carrier plate and process for manufacturing soft substrate by method
A flexible substrate and optical technology, used in chemical instruments and methods, semiconductor/solid-state device manufacturing, lamination devices, etc., can solve problems such as yield decline, affecting process, and reduce equipment costs and production costs.
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[0032] In order to enable your examiner to clearly understand the content of the present invention, the following descriptions are provided together with the drawings, please refer to them.
[0033] see Figure 5 As shown, it is a flowchart of a preferred embodiment of the method for laminating an optical substrate and a carrier plate according to the present invention, which includes the following steps
[0034] S11: Provide an optical substrate.
[0035] S12: Provide a solid silica gel layer, which has an electrostatic adsorption force.
[0036] S13: disposing the solid silica gel layer on the optical substrate by electrostatic adsorption.
[0037] S14: Provide a carrier board.
[0038] S15: placing the carrier plate on the solid silica gel layer by electrostatic adsorption.
[0039] Please also refer to Figure 6 , which is a schematic diagram of a preferred embodiment of the method for laminating an optical substrate and a carrier in the present invention.
[0040] T...
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