Method for configuring formula editor of IC (Integrated Circuit) equipment

Abstract

The invention relates to a method for configuring a formula editor of IC (Integrated Circuit) equipment. The method comprises the following steps of: starting a configuration window in the formula editor; configuring configuration information in the formula of the IC equipment, in the configuration window, and storing the configuration information as a configuration file; renewably starting the formula editor, and automatically reading the information in the configuration file; and generating a formula edition interface of the formula editor by the formula editor according to the read information of the configuration file and the renewably setting for the structure of the formula editor. According to the method, a user can effectively configure the formula editor under the condition of not modifying codes, the table structure of the formula editor can be configured on the aspects of achieving the parent-child relation among parameters, flexibly splitting table cells and the like, in addition, the formula editor can also be associated to different configuration files specific to different formula types, and thus, the multiple configuration of the formula editor is realized.

Description

technical field [0001] The invention relates to an editor configuration technology, in particular to a configuration method for an IC equipment formula editor. Background technique [0002] The IC (integrated circuit, integrated circuit) industry is a highly specialized industry. The production process of general IC equipment is very complicated, and its formula is also more complicated than other industries. When designing a recipe editor, it is often necessary to change the content and structure of the recipe according to different applicable environments, so the flexibility of recipe editor design has become a difficult problem for IC software developers. [0003] The conventional recipe editor is a fixed form editor, and its flexibility is greatly limited. Some recipe editors can configure their content through the configuration file in the IC software, but the flexibility is not strong, and the specific structure of the recipe editor, such as the table structure, canno...

AI Technical Summary

Problems solved by technology

[0003] The conventional recipe editor is a fixed form editor, and its flexibility is greatly limited

Some recipe editors can configure their content through configuration files in IC software, but the flexibility is not strong, and the specific structure of the recipe editor, such as the table structure, cannot be configured

If you need to make major changes to the recipe structure, you need to modify the program code of the recipe editor in the IC software, which is very cumbersome

This not only increases the complexity of the customer's modification of the formula structure, but also sometimes requires the designer to modify the program, which increases the development cost

At the same time, since the structure of the recipe editor needs to be redesigned for each development, the complexity of the secondary development is increased

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