Micro-crystalline thin film transistor, display device including the same and manufacturing method thereof
A technology for thin film transistors and display devices, which is applied in the manufacture of semiconductor/solid-state devices, electric solid-state devices, semiconductor devices, etc., can solve problems such as contrast deterioration of display devices
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[0033] Reference will now be made in detail to illustrative embodiments of the present invention, preferred embodiments of which are illustrated in the accompanying drawings.
[0034] image 3 is a cross-sectional view illustrating a microcrystalline silicon thin film transistor according to a first embodiment of the present invention.
[0035] refer to image 3 , the gate 112 is formed on the substrate 110 . The gate 112 is formed of a conductive material such as metal. A gate insulating layer 116 is formed on the gate electrode 112 .
[0036] The active layer 120 is formed on the gate insulating layer 116 . Although not shown in the drawings, the active layer 120 has an in-plane pattern corresponding to the gate electrode 112 . The active layer 120 is made of microcrystalline silicon formed by crystallizing amorphous silicon using an infrared laser. The etch stopper 122 is formed on the active layer 120 and serves to prevent the active layer 120 corresponding to the ch...
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