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Crystallization apparatus using sequential lateral solidification

一种结晶设备、横向固化的技术，应用在焊接设备、激光焊接设备、金属加工设备等方向，能够解决多晶硅污染、晶体小尺寸、TFT器件特性恶化等问题

Active Publication Date: 2012-07-11
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since polysilicon is contaminated with metals, the characteristics of TFT devices including silicon layers deteriorate
Also, the crystals formed may be of small size and the crystals will be distributed in a disordered manner

Method used

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  • Crystallization apparatus using sequential lateral solidification
  • Crystallization apparatus using sequential lateral solidification
  • Crystallization apparatus using sequential lateral solidification

Examples

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Embodiment Construction

[0033] Embodiments will now be described more fully with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will convey information to those skilled in the art. fully convey the concept of the present invention.

[0034] Figure 1A A schematic diagram of a crystallization apparatus 100 according to an embodiment is shown. Figure 1B show Figure 1A A detailed diagram of the primary optical system of the crystallization apparatus 100.

[0035] see Figure 1A with Figure 1B , the crystallization apparatus 100 may include: a laser generating device 101 for generating a laser beam L, an extended optical system 102 for extending the sustain period of each pulse in the laser beam L emitted from the...

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Abstract

A crystallization apparatus using sequential lateral solidification (SLS). The crystallization apparatus that performs crystallization on a substrate using sequential lateral solidification (SLS) includes a laser generating device for emitting a laser beam, a first telescope lens module and a second telescope lens module at one side of the laser generating device for minimizing a divergent angle of a laser beam emitted by the laser generating device; and a main optical system at one side of the second telescope lens module for uniformizing and amplifying a laser beam transmitted through the second telescope lens module. The main optical system is rotatably formed with respect to the laser generating device.

Description

[0001] Cross references to related patent applications [0002] This application claims the benefit of Korean Patent Application No. 10-2010-0109776 filed with the Korean Intellectual Property Office on Nov. 5, 2010, the disclosure of which is hereby incorporated by reference in its entirety. technical field [0003] One or more aspects relate to a crystallization apparatus, and more particularly, to a crystallization apparatus utilizing continuous lateral solidification (SLS), wherein a main optical system is formed to be capable of inclination at a predetermined angle relative to a laser generating device, so that crystallization in an amorphous region or The formation of tension is simultaneously prevented during forming. Background technique [0004] An active matrix (AM) type organic light emitting display device includes a pixel driving circuit in each pixel. The pixel driving circuit includes thin film transistors (TFTs) formed of silicon. Amorphous silicon or polyc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B13/22
CPCH01L27/1285H01L27/1222C30B13/22B23K26/0639H01L21/67115H01L21/2026B23K26/00B23K26/064H01L21/02686
Inventor 朴喆镐
Owner SAMSUNG DISPLAY CO LTD
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