Dual-axis linkage based rapid scanning method of scanning acoustic microscope

Abstract

The invention discloses a dual-axis linkage based rapid scanning method of a scanning acoustic microscope. The method comprises the steps of: (1) setting a scanning area S=(N.a)*(N.a), and starting moving while taking Lscan=(N-1)a / as the magnitude of motion displacements of motors at axes X and Y, wherein the motion directions of the axes X and Y are all positive directions; (2) when the two motors are stopped, changing the direction of the axis Y, maintaining the axis X unchanged, and moving while taking Lstep=a / as the magnitudes of the motion displacements of the motors at the axes X and Y; (3) after the two motors are stopped, changing the motion direction of the axis X, maintaining the axis Y unchanged, and continuously starting the motion of the motors at the axes X and Y, wherein the magnitudes of displacements are both Lscan; (4) after the two motors are stopped, changing the motion direction of the axis X, maintaining the axis Y unchanged, and continuously starting the motion of the motors at the axes X and Y, wherein the magnitudes of the displacements are both Lstep; and (5) after the motors are stopped, repeating the steps from (1) to (4) until an entire image is scanned completely. According to the invention, on the premise of not changing motion system hardware conditions and not decreasing imaging resolution, the scanning efficiency can be increased by more than 20%.

Description

technical field [0001] The invention relates to a fast scanning method for microscopic imaging, in particular to a fast scanning method for a scanning ultrasonic microscope based on two-axis linkage. Background technique [0002] Scanning Ultrasonic Microscope (SAM: Scanning Acoustic Microscope) is widely used in non-destructive testing and evaluation of key electronic devices and precision mechanical components, and is also widely used in microscopic observation of biological tissues. [0003] In a scanning ultrasonic microscope, a two-dimensional mechanical scanning mechanism is often used to carry a probe to complete the detection of the entire sample to be tested. The actuators of the scanning mechanism generally use linear motors or rotary motors plus precision ball screws. The traditional two-dimensional mechanical scanning mode is a raster scanning mode, so that the X-axis motor is responsible for line scanning. After scanning a line, the Y-axis motor steps once, and...

AI Technical Summary

Problems solved by technology

[0006] However, the traditional grid scanning mode fails to make full use of the coordinated work of the X-axis and Y-axis motors. During the scanning process, one motor always drives the ultrasonic probe to scan, which is inefficient.

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