Charging device for single crystal furnace

Abstract

The invention discloses a charging device for a single crystal furnace. The charging device comprises a vacuum pump, a charger, a charging connecting cylinder, a hopper, an inner tube, an inner tube support piece, an outer tube, an outer tube support, a rotating motor and a linear movement guide rail; the upper part of the charger is connected with the vacuum pump through a vacuum tube; upper and lower ends of the charging connecting cylinder are respectively provided with a vacuum seal connecting flange; the upper end of the charging connecting cylinder is connected with the charger through the vacuum seal connecting flange; the rotating motor is arranged on the upper side of the charging connecting cylinder and coaxially drives the linear movement guide rail; the upper end of the hopper is fixed on the inner side of the upper part of the charging connecting cylinder; and the lower end of the hopper is connected with the inner tube. The charging device has the advantages that: under the control of the rotating motor and the linear movement guide rail, the charging is accurate and convenient, and the charging device charges quartz crucibles of single crystal furnaces in different models and sizes, and avoids energy waste.

Description

technical field [0001] The invention relates to a single crystal furnace feeding device, in particular to a single crystal furnace feeding device for feeding a single crystal furnace quartz crucible. Background technique [0002] Nowadays, most of the single crystal furnaces adopt the method of one-time feeding to the quartz crucible, but many times the quartz crucible is not filled, and the production of the single crystal furnace requires a lot of heat energy, which undoubtedly causes a lot of energy waste. Most of the single crystal furnaces are produced by Czochralski single crystal furnaces. In the production process, usually after the production of a furnace, the temperature of the single crystal furnace is cooled and it is suitable for human operation, and then the charging work is carried out. This not only Time is wasted, and the thermal field system of the single crystal furnace has to be cooled and heated repeatedly, which seriously affects the service life of the...

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Problems solved by technology

[0002] Nowadays, most of the single crystal furnaces use the method of one-time feeding to the quartz crucible, but many times the quartz crucible is not filled up, and the production of single crystal furnaces requires a lot of heat energy, which undoubtedly causes a lot of energy waste

Most of the single crystal furnaces are produced by Czochralski single crystal furnaces. In the production process, usually after the production of a furnace, the temperature of the single crystal furnace is cooled and it is suitable for human operation, and then the charging work is carried out. This not only It is a waste of time, and the thermal field system of the single crystal furnace has to be cooled and heated repeatedly, which seriously affects the service life of the thermal field system and greatly increases the cost of the monocrystalline silicon production enterprise

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