Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Evaporation boat and mould forming method using the same

A boat and evaporation technology, which is applied in the field of boats for evaporation, can solve the problems of shrinking the evaporation area of ​​the material, the temperature of the heating surface, and the influence of uniform film formation, so as to avoid the sharp drop in temperature and eliminate the effects of droplets.

Inactive Publication Date: 2012-09-19
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that the material wire 6 sent out from the material wire guide 5 is melted in the air, and the droplets generated by the molten material wire 6 being dropped on the vapor deposition boat 1a affect uniform film formation.
[0016] However, in the structure of Patent Document 2, although the formation of droplets can be prevented, since the heating surface 12 is formed in the central area of ​​the pool 2, the material evaporation area is divided into two by the heating surface 12, and thus uneven film formation may occur.
In addition, there are also new technical problems such as temperature reduction around the heating surface 12 and reduction of material evaporation area.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Evaporation boat and mould forming method using the same
  • Evaporation boat and mould forming method using the same
  • Evaporation boat and mould forming method using the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0064] figure 1 with figure 2 (a), figure 2 (b) shows the vapor deposition boat of Example 1 of the present invention.

[0065] The vapor deposition boat 1d has a pool 2 for storing molten film material formed on an upper surface U extending in the longitudinal direction connecting one end 3a and the other end 3b of a boat body M made of graphite as a main part. Such as figure 2 As shown in (b), a protrusion 13a having a cross-sectional area larger than the cross-sectional area of ​​the other end 3b is integrally formed on the back of the pool 2 near the one end 3a. Such as figure 2 As shown in (b), a flat portion 14 having a cross-sectional area smaller than the cross-sectional area of ​​the protrusion 13a is formed on the back surface of the pool 2 near the other end 3b. Such as figure 2 As shown in (b), an inclined portion 15a is formed between the protrusion 13a on the back of the pool 2 and the flat portion 14. The cross-sectional area of ​​the inclined portion 15a gra...

Embodiment approach 2

[0080] Figure 5 with Image 6 (a), Image 6 (b), Image 6 (c) shows the vapor deposition boat of Example 2 of the present invention.

[0081] In the first embodiment, the protrusion 13a is formed to protrude on the back surface of the cell 2, but in the present embodiment 2, the protrusions 13aa and 13ab are formed to protrude on the side surface of the cell 2, which is different from the first embodiment.

[0082] The vapor deposition boat 1f is composed of a pool 2, protrusions 13aa, 13ab, inclined portions 15aa, 15ab, and a flat portion 14. The protrusions 13aa, 13ab are provided on both sides of the vapor deposition boat 1f, and the inclined portion 15aa and 15ab are provided adjacent to the protruding portions 13aa and 13ab, and the flat portion 14 is provided adjacent to the inclined portions 15aa and 15ab.

[0083] In order to maintain the evaporation area, it is desirable that the ratio of the cross-sectional area of ​​the protrusions 13aa, 13ab to the minimum cross-sectiona...

Embodiment approach 3

[0086] Figure 7 with Figure 8 (a), Figure 8 (b) shows the vapor deposition boat of Example 3 of the present invention.

[0087] in figure 1 with figure 2 (a), figure 2 (b) In the first embodiment shown, the material supply part 9a is formed only on the side of the one end 3a of the tank 2. However, in the vapor deposition boat 1g of the third embodiment, the above-mentioned other The material supply part 9b is formed on the one end 3b side.

[0088] In other words, a material supply part 9b as a second material supply part, which sandwiches the material evaporation part 10 and is connected to the material evaporation part 10 near the other end 3b, is provided in the pool 2, and is located on the back of the tank 2 near the other end. Near 3b is integrally formed a protrusion 13b as a second protrusion having a cross-sectional area larger than that of the flat portion 14. A temperature distribution is formed in the tank 2 along the above-mentioned longitudinal direction, and a...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Provided are an evaporation boat and a mould forming method using the same. The evaporation boat can eliminate sprays generated by fusion of material wire rods in air and a material evaporation area can not shrink. The temperature of a material supplying part (9a) on one end (3a) of a pool (2) is lower than a temperature of a material evaporation part (10) connected with on side of the other end (3b) of the material supplying part (9a). A back of the material evaporation part (10) of the pool (2) is provided with a flat part (14) and an inclined part (15a) for connecting the flat part (14) with the material supplying part (9a) which have a same sectional area; the inclined part (15a) forms a sectional area which becomes larger from the end (3a) to the other end (3b) so as to form temperature distribution.

Description

Technical field [0001] The invention relates to an evaporation boat for heating a thin film material to evaporate it. Background technique [0002] As a representative method for forming a thin film on a substrate, there is a vacuum evaporation method. [0003] In the above method, a thin film is formed on the substrate provided in the upper part of the covering chamber by putting the covering chamber in a vacuum state and evaporating the film forming material at a high temperature inside. The film-formed substrate exhibits the characteristics of the film and can be used in various high-performance devices including semiconductors. [0004] In the heating device (evaporation source) of the vacuum vapor deposition device, a device for heating by the resistance heating method, the electric impact method, or the high-frequency induction heating method is used, but the simple resistance heating method is highly universal. [0005] In addition, the evaporation source for resistance heatin...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
Inventor 竹泽昌宏山本昌裕上口洋辉大岛章义
Owner PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com