Method for automatically monitoring manufacturing procedure

Abstract

The invention provides a method for automatically monitoring a manufacturing procedure. The method comprises the following steps: sequentially providing multiple substrates and enabling the substrates to pass through a first position and a second position in turn; detecting the substrates at the first position and the second position; if the substrates passing through the first position do not pass through the second position within a predetermined time, waiting for a predetermined delay time; and after waiting for the predetermined delay time, if the substrates passing through the first position do not pass through the second position yet, generating an alarm. The method for automatically monitoring a manufacturing procedure provided by the invention can monitor the operation condition of the substrates, and can get the exception in carrying the substrates in time so as to avoid the loss of cost due to the overlapping of many substrates.

Description

technical field [0001] The invention relates to a method for automatically monitoring a process, and in particular to a method for automatically monitoring a process by using time. Background technique [0002] The automation equipment mainly includes the cavity for the process and the conveying device for conveying the unfinished products. The unfinished product is transported into the chamber for the process by the conveying device, and is conveyed out of the chamber after the processing is completed. [0003] During the processing process, the generation of fragments and laminations often directly affects the yield, thereby increasing the production cost. During the conveying process of the substrates, since the substrates are continuously conveyed one by one, the fragmented substrates are often collided by another following substrate, resulting in a large number of stacked substrates. In addition, the aging and rusting of the components of the conveying device will als...

AI Technical Summary

Problems solved by technology

However, for etching equipment, due to the use of a large amount of corrosive chemical solutions in the chamber for the process, it is impossible to install a general detector in the chamber for monitoring the transmission status of the unfinished product

Once a large number of laminations occur inside the cavity, the machine will not issue an alarm, and can only rely on manual discovery. For example, during the rest time when the manpower is relatively tight, a large number of fragments are often found.

In addition, even detectors made of high-cost and high-resistance materials cannot meet the requirements

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