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Alignment and anti-drift mechanism

A drift and displacement sensor technology, applied in the field of systems with alignment and anti-drift mechanisms, to achieve the effect of reducing signal drift

Inactive Publication Date: 2012-12-26
ACAD SINIC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, such systems can only maintain temperature and humidity within a certain range

Method used

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  • Alignment and anti-drift mechanism
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  • Alignment and anti-drift mechanism

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Experimental program
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Embodiment Construction

[0030] Please refer to figure 1 As shown, in a displacement measurement system, an output signal 100 may drift rapidly, wherein when the system is turned on (corresponding to region 102 ), the system will stabilize within seconds to minutes (corresponding to region 104 ). However, the output signal 100 will continue to slowly drift during operation of the displacement measurement system. Among them, most of the signal drift is caused by the drift of the surrounding temperature. If the displacement measurement system is operated without environmental control devices and without other drift compensation, the output signal drift is approximately proportional to the drift of the system temperature, and the signal can depend on the thermal expansion characteristics of the materials in the displacement measurement system and the temperature in the system. The presence or absence of relaxation of mechanical stresses in the medium drifts in the positive or negative direction.

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Abstract

A system includes a displacement sensor, an actuator connected to the displacement sensor and / or a to-be-measured object, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.

Description

[0001] Cross-references to related applications [0002] This application is related to U.S. Patent No. 7,2487,827 (the title of the invention is the measurement system for the height, angle and change of the surface of the object to be measured), which was applied on May 31, 2006 and approved on July 24, 2007 , and is related to Taiwan Patent No. I264520 approved on October 21, 2006, the content of which is incorporated herein by reference in its entirety. [0003] This application is also related to U.S. Patent Co-Application No. _ / _,_ filed on October 19, 2009 (Attorney Case No. 70002-215001, titled "Optical Imaging System"), the contents of which are reproduced in full Incorporated herein by reference. technical field [0004] The present invention relates to a system and method with alignment and anti-drift mechanism. Background technique [0005] A variety of measurement methods, such as beam deflection, astigmatic detection, and capacitance measurement, have been w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q40/00G01B21/32
CPCG01Q10/065B82Y35/00
Inventor 黄英硕胡恩德汉斯·乌尔利·丹佐布林克哈德莫·I
Owner ACAD SINIC