Partially-decoupled plane three-freedom-degree parallel precision positioning platform
A precision positioning and degree of freedom technology, applied in the direction of machine/support, supporting machine, mechanical equipment, etc., can solve the problems of strong coupling, complex kinematics solution, low precision, etc., to overcome kinematic coupling, design and install conveniently, high precision effect
Active Publication Date: 2014-09-10
SOUTH CHINA UNIV OF TECH
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Problems solved by technology
[0004] The purpose of the present invention is to overcome the problems of existing 3PRP parallel platforms, such as strong coupling, low precision, complex kinematics solution, etc., and provide a partially decoupled planar three-degree-of-freedom parallel precision positioning platform, which fully meets the high requirements of the positioning platform. Accuracy requirements
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[0022] Such as figure 2 shown. The partially decoupled planar three-degree-of-freedom parallel precision positioning platform of the present invention includes a moving platform and a fixed platform, and three groups of driving branches with the same structure are installed between the moving platform and the fixed platform, wherein: each group of driving branches includes sequentially The first moving pair 3, the second moving pair 4, and the rotating pair 4-1 are connected to form a PPR drive chain, that is, the guide rail 3-1 of the first moving pair 3 is fixedly connected to the fixed platform 2, and the guide rail 4 of the second moving pair 4 -2 is fixedly connected to the slider of the first moving pair 3, one end of the rotary hinge of the rotating pair 4-1 is connected to the slider of the second moving pair 4, and the other end is fixedly connected to the moving platform 1.
[0023] It should be noted that these three groups of driving branches with the same struct...
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The invention discloses a partially-decoupled plane three-freedom-degree parallel precision positioning platform. The partially-decoupled plane three-freedom-degree parallel precision positioning platform comprises a movable platform and a fixed platform, wherein three groups of driving branches with the same structures are arranged between the movable platform and the fixed platform; and every group of driving branch comprises a pentatricopeptide repeats (PPR) driving chain which is formed by sequentially connecting a first movable pair, a second movable pair and a rotary pair. According to the PPR driving chain, a guide rail of the first movable pair is fixedly connected with the fixed platform, a guide rail of the second movable pair is fixedly connected with a slider of the first movable pair, one end of a rotary hinge of the rotary pair is connected with a slider of the second movable pair, and the other end of the rotary hinge of the rotary pair is connected with the movable platform. A motion input part is decoupled, and motion input in the X direction (Y direction) cannot cause driven motion in the X direction (Y direction). By the easy technical means, the defects that the conventional parallel mechanism is complicated in kinematic coupling and kinematic solution and fussy in designing and machining, and the like are overcome, the requirement for high precision of the precision positioning platform can be met, and the partially-decoupled plane three-freedom-degree parallel precision positioning platform has wide application prospect in the fields of precision machining, microelectronic manufacturing and the like.
Description
technical field [0001] The invention relates to a position adjustment mechanism, in particular to a partially decoupled plane three-degree-of-freedom parallel precision positioning platform. Background technique [0002] Precision positioning platforms have a wide range of demands in the fields of microelectronics and precision machining. Currently widely used precision positioning platforms can be divided into two categories: series platforms and parallel platforms. The movement of each direction of the series platform is controlled by a set of independent driving devices, so it is easy to control, but its structure is huge, the installation is cumbersome, the bottom degree of freedom is stressed, and it is easy to wear and deform. Compared with the series platform, the parallel platform has the advantages of no cumulative error, high precision, fast dynamic response, compact structure, and good rigidity. Therefore, the parallel platform can better meet the requirements o...
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IPC IPC(8): F16M11/06F16M11/18
Inventor 张宪民梁经伦邝泳聪虞召源欧阳高飞
Owner SOUTH CHINA UNIV OF TECH