Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Inspection apparatus and inspection method of magnetic sensor

A magnetic sensor and inspection device technology, which is applied to the size/direction of the magnetic field, measuring devices, instruments, etc., can solve the problems of inaccurate detection of the magnetic field and low inspection accuracy, and achieve the effect of improving the inspection accuracy.

Inactive Publication Date: 2013-03-06
YAMAHA CORP
View PDF5 Cites 17 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This arrangement may not accurately detect the magnetic field affecting the magnetic sensor installed in the socket
Namely, the technique may suffer from low inspection accuracy

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Inspection apparatus and inspection method of magnetic sensor
  • Inspection apparatus and inspection method of magnetic sensor
  • Inspection apparatus and inspection method of magnetic sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] The present invention will be described in further detail by way of example with reference to the accompanying drawings.

[0029] figure 1 is a perspective view of the magnetic sensor detecting device 1 according to the preferred embodiment of the present invention. The overall structure of the magnetic sensor inspection apparatus 1 is defined using a frame 2 equipped with six magnetic field generating coils 3 to 8 and a single probe card 9 . The frame 2 is equipped with a movable platform 12 for mounting a sensor assembly 11 which is a wafer-like array of magnetic sensors 10 .

[0030] The magnetic field generating coils 3 to 8 are subdivided into pairs of coils in which two coils are paired and arranged to face each other in the axial direction. Magnetic field generating coils 3, 4 are paired and attached to the left and right sides of the frame 2; magnetic field generating coils 5, 6 are paired and attached to the front and rear sides of the frame 2; magnetic field...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to an inspection apparatus and an inspection method of a magnetic sensor. The magnetic sensor inspection apparatus has a rectangular frame including a stage, a probe card, and a plurality of magnetic field generating coils. A wafer-like array of magnetic sensors is mounted on the stage, which is movable in horizontal and vertical directions. The probe card includes a plurality of probes which are brought into contact with a plurality of magnetic sensors encompassed in a measurement area. The magnetic field generating coils are driven to generate a magnetic field toward the stage. A plurality of magnetic field environment measuring sensors is arranged in the peripheral portion of the probe card surrounding the probes. A magnetic field controller controls magnetic fields generated by the magnetic field generating coils based on the measurement result of the magnetic field environment measuring sensors. Thus, it is possible to concurrently inspect a wafer-like array of magnetic sensors with the probe card.

Description

technical field [0001] The present invention relates to an inspection device and an inspection method for use in inspection routines of magnetic sensors, in particular for inspecting wafer-like arrays of magnetic sensors with respect to their magnetic properties and sensitivities via magnetic property tests under predetermined environmental conditions routine. [0002] This application claims priority from Japanese Patent Application No. 2011-175337, the contents of which are incorporated herein by reference. Background technique [0003] According to conventionally known inspection routines of magnetic properties of magnetic sensors, the magnetic sensors are each placed in a magnetic field generated using a magnetic field generating coil such as a Helmholtz coil, and then tested to measure their output signals. Inspecting each individual magnetic sensor enclosed in its package requires cumbersome processing and can incur financial losses in assembly costs for magnetic sens...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01R35/00
CPCG01R33/0035G01R35/00G01R33/0052G01R33/02
Inventor 铃木隆嗣
Owner YAMAHA CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com