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Gluing method of wedge-shaped plate group and fixture

A technology of wedge-shaped plate group and wedge-shaped plate is applied in the field of lithography machine, which can solve the problem of not meeting the requirements of 90nm lithography machine and so on.

Active Publication Date: 2014-08-20
SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the glued (40 to 60) x (40 to 60) mm material in European and American countries is SCHOTT BK7 (after processing, the aperture is N=1, △N=0.3, see the central area figure 1 The shown N=0.2, △N=0.1; glued after coating, the aperture requirement after gluing is N=1, △N=0.3), the central area can reach the requirements of N=0.2, △N=0.1 after gluing, glue The thickness of the layer is controlled at 15 μm, the area of ​​the glue spreads in a specific area, and the final diffusion area of ​​the glue is controlled between 8--12 mm in diameter; however, after the gluing of the wedge plate group glued by domestic enterprises is completed, the aperture in the central area is N=2~ 2.5, △N=1~1.5, far from meeting the requirements of 90nm lithography machine

Method used

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  • Gluing method of wedge-shaped plate group and fixture
  • Gluing method of wedge-shaped plate group and fixture
  • Gluing method of wedge-shaped plate group and fixture

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0041] A solution to prevent the influence of the temperature and humidity of the workshop where the gluing is located on the gluing

[0042] The clean room temperature is 20-26°C ± 0.1°C, the humidity is 50-70%, and it is carried out under standard atmospheric pressure;

[0043] 1. Make the glued surface of the wedge plate free from pollution or impurities as much as possible;

[0044] solution

[0045] Wipe the clean workbench that needs to be in a clean room of at least 10,000 grades (the factory laboratory meets the requirements)

[0046] When wiping inside, wear anti-static gloves and a mask, use an anti-static professional optical glass cloth dipped in alcohol to wipe, and put the wedge-shaped plate under a 100w light to watch the surface dust carefully until it is ...

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Abstract

The invention discloses a gluing method of a wedge-shaped plate group and a fixture. The gluing method of the wedge-shaped plate group comprises the following steps of: (1) building an ultra-clean working chamber and an ultra-clean working table; (2) dipping anti-static optical glass wiping cloth into alcohol for wiping coated wedge-shaped plates meeting the requirements on the ultra-clean working table; (3) aligning a first wedge-shaped plate and a second wedge-shaped plate to form the wedge-shaped plate group; (4) gluing the wedge-shaped plate in a semi-cured manner; (5) initially carrying out curing measurement; (6) finally, carrying out the curing measurement; and (7) packaging the glued wedge-shaped plate group, so that the glued wedge-shaped plate group is entirely cured. According to the gluing method of the wedge-shaped plate group disclosed by the invention, the reject rate is reduced, the high-quality requirements of the glued wedge-shaped plate group are met, and the photo-etching requirement is met.

Description

technical field [0001] The present invention relates to a lithography machine, in particular to a gluing method and fixture for a wedge group of a lithography machine. The gluing of the wedge group is mainly used for light diffraction separation, and the result directly affects the silicon in the lithography machine. Sheet-to-bit grating automatic alignment. Background technique [0002] At present, the glued (40 to 60) x (40 to 60) mm material in European and American countries is SCHOTT BK7 (after processing, the aperture is N=1, △N=0.3, see figure 1 The shown N=0.2, △N=0.1; glued after coating, the aperture requirement after gluing is N=1, △N=0.3), the central area can reach the requirements of N=0.2, △N=0.1 after gluing. The thickness of the layer is controlled at 15 μm, the glue area is diffused in a specific area, and the final diffusion area of ​​the glue is controlled between 8--12mm in diameter; however, after the gluing of the wedge plate group glued by domestic ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 蒋泉权魏向荣顾亚平
Owner SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT