Light curtain sensor interlocking method

A light curtain sensor and sensor technology, applied in the direction of optical device exploration, etc., can solve problems such as pressing on obstacles and injuring operators, and achieve the effect of preventing accidents, high reliability, and high safety assurance.

Inactive Publication Date: 2013-06-05
BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because when the ion implanter is working, the library door and the elevator of the library are in a constant switching state. If there is an obstacle (such as a wafer not in place) or a person enters the vicinity of the library, it may be directly pressed against the obstacle or cause injury. personnel

Method used

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  • Light curtain sensor interlocking method

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Embodiment approach

[0011] The patent of the present invention discloses a light curtain sensor interlocking method. The specific technical implementation plan is as follows: use the light curtain sensor (1) to detect whether there is an obstacle at the film warehouse door and the film warehouse elevator, according to K1, K2, K3 and K4 Different signals, through the interlocking signal of the sensor (2), realize the automatic stop of the left film warehouse door and the elevator (5), and the right film warehouse door and the elevator (8).

[0012] First, the transmitter of the light curtain sensor (1) of the left film warehouse door is installed on the left film warehouse door, and the receiver is installed below it; the transmitter of the light curtain sensor (1) of the right film warehouse is installed on the right On the film library door, the receiving end is installed below it. The light curtain sensor (1) sends out a sensor interlocking signal (2), is directly connected with the data card o...

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Abstract

A light curtain sensor interlocking method relates to a light curtain sensor (1), sensor interlocking signals (2), a left vault door brake (3), a left vault elevator brake (4), a left vault door and an elevator (5), a right vault door brake (6), a right vault elevator brake (7), a right vault door and an elevator (8), and a computer main interface (9). The light curtain sensor interlocking method is characterized in that the light curtain sensor (1) sends out the sensor interlocking signals (2) when a barrier is detected, and automatically enables the vault doors and the vault elevators of an ion implanter to stop completely, ensures that the vault doors do not crush the barrier (such as wafers out of place), prevents the vault doors from crushing the wafers out of place, avoiding extrusion damage to body of an operator during debugging, and at the same time sends out alarm to the computer main interface (9) to display. The light curtain sensor interlocking method improves the safety protection function of a device, ensures that the ion implanter is safe, protects personal safety of the operator, and improves reliability and safety of the ion implanter.

Description

technical field [0001] The invention relates to an interlocking method of a light curtain sensor, in particular to an automatic operation method used in an ion implanter to ensure equipment safety and personnel safety, and belongs to the field of semiconductor equipment. Background technique [0002] The ion implanter is a kind of particle accelerator. During the operation of the ion implanter, the film library door and the film library elevator should be in a normal and safe state. Because when the ion implanter is working, the library door and the elevator of the library are in a constant switching state. If there is an obstacle (such as a wafer not in place) or a person enters the vicinity of the library, it may be directly pressed against the obstacle or cause injury. personnel. Therefore, it is very important to detect obstacles on the film library door and the film library elevator. Keep the equipment in a safe state to prevent accidents. Contents of the invention ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01V8/20
Inventor 胡东京
Owner BEIJING ZHONGKEXIN ELECTRONICS EQUIP
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