High-precision adjustment method of collimator reticle based on plane interference principle

Abstract

The invention discloses a collimator tube reticle high-precision adjusting method based on a plane interference principle. The collimator tube reticle high-precision adjusting method based on the plane interference principle resolves the problems that a collimator tube reticle is low in fixed focus precision and not capable of carrying out quantitative interpretation. According to the collimator tube reticle high-precision adjusting method based on the plane interference principle, a spherical reflector, collimator tubes and an interferometer are enabled to be adjusted to share the same optical axis, the focus of the spherical reflector and the focus on the axis of the collimator tubes are parfocalized, the reticle is enabled to be brought in a light path, a pitching azimuth angle of the reticle is fine-tuned, and front-back defocusing adjustment is carried out on the reticle along a direction of the optical axis; computation is carried out on interference fringes collected by the interferometer, a defocusing amount Delta d of the reticle is obtained through a Power value of a Zernike coefficient, a interfering beam caliber D and mathematic relation of a collimator tube focal length f', and the collimator tube reticle high-precision adjusting method based on the plane interference principle is achieved. The collimator tube reticle high-precision adjusting method based on the plane interference principle is capable of figuring out real-time misalignment of the reticle, avoiding blindness of finding a turning point through manual visual interpretation, and improving adjusting efficiency and precision.

Description

technical field [0001] The invention belongs to the technical field of optical detection and adjustment, and in particular relates to a high-precision adjustment method for a parallel light tube reticle based on the principle of plane interference. Background technique [0002] The collimator images all kinds of differentiated targets on its focal plane to infinity through the optical system to imitate optical targets with different spectral characteristics, radiation characteristics and geometric characteristics. The core testing equipment used. Among them, the reticle is to copy the specific geometric figure on the glass substrate by photolithography method, and realize the optical parameter detection by imaging to infinity through the optical system of the collimator. According to the working principle of the collimator, only when the graphic and patterned surface of the reticle is located in the focal plane of the collimator optical system, the outgoing beam has the cha...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems existing in the prior art, the present invention provides a method for high-precision assembly and adjustment of the collimator reticle based on the principle of plane interference. Under the condition that the focal length of the collimator is equivalent to the focal length of the optical system to be tested, the technical problem of the low precision of the fixed focus and the inability to quantitatively interpret it

Images