A low-delay decentralized magnetic switch compression pulse power supply reset circuit
A technology of reset circuit and pulse power supply, applied in pulse technology, electronic switches, electrical components, etc., can solve the problems of complex reset circuit design, low-latency dispersion, etc., and achieve the effect of suppressing instability
Active Publication Date: 2015-12-09
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology
[0004] The purpose of the present invention is to provide a low-delay decentralized magnetic switch compression pulse power supply reset circuit to solve the problem of complex reset circuit design in the magnetic compression switch circuit in the existing excimer laser power supply Source reset circuit, can obtain high voltage pulse output with low delay dispersion
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[0012] In the reset circuit of a low-delay decentralized magnetic switch compression pulse power supply provided by the present invention, the reset circuit of the first-stage magnetic switch winds coils on the ring magnetic core of the magnetic switch and the ring magnetic core of the pulse transformer respectively, and then connects the inductor constitute. The reset circuit can significantly reduce the delay jitter of the output high-voltage pulse caused by the instability of the primary magnetic switch saturation process; and a DC bias current source can be set in the reset circuit to provide a reset current, by adjusting the size of the reset current to Control the saturation time of the primary magnetic switch, thereby effectively improving the energy transfer efficiency, or controlling the pulse delay; the secondary magnetic switch reset circuit is passed on the toroidal core of the secondary magnetic switch and the toroidal core of the pulse transformer Wind the coil s...
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The invention discloses a magnetic switch compression pulse power reset circuit. The low-delay dispersive magnetic switch compression pulse power reset circuit comprises two levels of magnetic switch reset circuits. A first-level magnetic switch reset circuit comprises a first coupling coil, a direct current bias current source, a first inductor and a second coupling coil which are sequentially connected in series to form a return circuit, wherein the first coupling coil winding is arranged on an annular magnetic core of a first-level magnetic switch, and the second coupling coil winding is wound on an annular magnetic core of a transformer. A second-level magnetic switch reset circuit comprises a third coupling coil, a second inductor and a fourth coupling coil which are sequentially connected in series to form a return circuit, wherein the third coupling coil winding is arranged on an annular magnetic core of a saturable transformer, and the fourth coupling coil winding is arranged on an annular magnetic core of a second-level magnetic switch. The low-delay dispersive magnetic switch compression pulse power reset circuit resolves the problem that a reset circuit of a magnetic compression switch circuit of an existing excimer laser power source is complex in design, and achieves low-delay dispersive high voltage pulse output by means of a passive reset circuit provided by a high-voltage part.
Description
technical field [0001] The invention belongs to the technology of pulse power supply, in particular to a low-delay dispersed magnetic switch compression pulse power reset circuit. Background technique [0002] Pulsed gas lasers with high repetition rates have developed rapidly since the birth of lasers. The pulsed gas laser makes the working gas obtain a uniform glow discharge through discharge excitation, and obtains the stimulated amplified laser output through the mode selection of the resonator. The discharge characteristics of the laser pulse power supply have a great influence on the working performance of the laser, and the energy level life of the excimer laser such as KrF and ArF is only on the order of 10-8s. Turn to generate laser output. In excimer lasers, discharge pumping with excitation pulse rise time less than 150ns is generally used to obtain discharge excitation. [0003] Magnetic switch pulse compression is a technique commonly used to obtain high volta...
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IPC IPC(8): H03K17/22H03K17/28
Inventor 徐勇跃胡耀文左都罗王新兵陆培祥
Owner HUAZHONG UNIV OF SCI & TECH