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A method and device for X-ray thickness measurement

An X-ray and thickness measurement technology, applied in the field of X-ray thickness measurement methods and devices, can solve the problems of beam hardening, difficulty and inconvenience in thickness measurement, and achieve high reliability, simple method and device, and high accuracy Effect

Inactive Publication Date: 2015-10-21
CHONGQING UNIV
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Problems solved by technology

Gamma ray is the most commonly used in isotope thickness measurement. The advantage of γ ray thickness measurement is that γ ray is a quasi-single-energy ray. When interacting with matter, the attenuation coefficient is a constant. The data processing is convenient and accurate, and has high reliability. , but the disadvantage is that there is a risk of radiation hazards in the use of isotope radioactive sources, which will bring a lot of inconvenience in terms of radiation protection measures for operators and management of isotope radioactive source warehouses, and increase the complexity and cost of its measurement
The X-ray thickness measurement does not have the above problems, but the distribution of X-ray energy is continuous, and the phenomenon of "beam hardening" will appear when interacting with matter. The attenuation coefficient is not a fixed constant, but a variable. This makes it difficult to measure thickness

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Embodiment Construction

[0018] First, the theoretical basis of the X-ray thickness measuring method in the present invention is as follows: Measuring the thickness of an object by using X-rays is based on the principle that the X-ray intensity is weakened when passing through the measured object. Under specific energy and wavelength, the radiation intensity I of X-ray passing through the material whose thickness is d is given by the following formula (Beer's theorem): I=I 0 e -μd (1), where I 0 is the incident X-ray intensity, I is the ray intensity after passing through the measured object, d is the thickness of the measured object, and μ is the linear attenuation coefficient of the material, which is determined by the chemical composition of the material and the wavelength of the X-ray. Transform (1) to get:

[0019] Ideally, the linear attenuation coefficient μ of the measured substance can be expressed as: μ=kρz 3 lambda 3 (3), where k is the coefficient, ρ is the material density, z is ...

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Abstract

The invention discloses a method and device for measuring X-ray thickness and belongs to the field of ray measurement. The method for measuring the X-ray thickness comprises the steps of (1) arranging an X-ray emitter and adjusting emitting parameters; (2) starting up the X-ray emitter and measuring energy data I0 of rays in the air where an object is not placed; (3) starting up the X-ray emitter, enabling X-rays to penetrate through a standard to-be-measured material with known thickness d and measuring the ray energy data I after the rays penetrates through the to-be-measured material; and (4) calculating correction parameters by means of the following methods for obtaining corresponding attenuation coefficients mu according to a formula, performing least-squares curve fitting calibration to obtain the correction parameters A, alpha and beta according to a formula mu(d)=A(e-alphad+beta) and performing thickness measurement of the to-be-measured material according to a formula. By means of the method, the problem of mismeasurement caused by 'beam hardening' of the X-rays is solved. The method has a correction function. The method and device for measuring the X-ray thickness is simple and easy to operate, high in accuracy and strong in reliability.

Description

technical field [0001] The invention belongs to the field of ray measurement, and relates to an X-ray thickness measurement method and device. Background technique [0002] Thickness is one of the dimensional quality indicators of metal processing. It is very important to measure the thickness of metal devices, especially the thickness of strip metal materials in the process of material processing and application. Therefore, how to measure the thickness of metal strip materials Making measurements has long been a focus of research in this field. [0003] At present, with the rapid development and maturity of nuclear physics technology, according to the principle of the interaction between radiation and matter, nuclear technology has been widely used in marginal science, industry and medicine. The generation of this method is to obtain the thickness value of the material to be tested by analyzing the relationship between the intensity change of the ray passing through the ma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B15/02
Inventor 高富强陈赟飞周钦安康冯永严强李岭兰扬
Owner CHONGQING UNIV
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