A method and device for X-ray thickness measurement
An X-ray and thickness measurement technology, applied in the field of X-ray thickness measurement methods and devices, can solve the problems of beam hardening, difficulty and inconvenience in thickness measurement, and achieve high reliability, simple method and device, and high accuracy Effect
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[0018] First, the theoretical basis of the X-ray thickness measuring method in the present invention is as follows: Measuring the thickness of an object by using X-rays is based on the principle that the X-ray intensity is weakened when passing through the measured object. Under specific energy and wavelength, the radiation intensity I of X-ray passing through the material whose thickness is d is given by the following formula (Beer's theorem): I=I 0 e -μd (1), where I 0 is the incident X-ray intensity, I is the ray intensity after passing through the measured object, d is the thickness of the measured object, and μ is the linear attenuation coefficient of the material, which is determined by the chemical composition of the material and the wavelength of the X-ray. Transform (1) to get:
[0019] Ideally, the linear attenuation coefficient μ of the measured substance can be expressed as: μ=kρz 3 lambda 3 (3), where k is the coefficient, ρ is the material density, z is ...
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