The present invention discloses a
graphite boat
electrode introduction device for PECVD equipment and an
electrode introduction control method, comprising: a driving element, a support base, a fixed seat, a sliding
assembly and an
electrode rod, one side of the support base is connected to the furnace
tail flange of the PECVD equipment, the other side of the support base is provided with a driving element, the output end of the driving element is connected to the fixed seat, the support base is provided with a sliding
assembly, the lower part of the fixed seat is connected to the sliding
assembly, the upper part of the fixed seat is connected to the electrode rod, the electrode rod passes through the furnace
tail flange and extends into the
reaction chamber; under the drive of the driving element, the fixed seat and the sliding assembly drive the electrode rod to move back and forth in a straight line to realize the electrode rod being inserted into or out of the electrode hole of the
graphite boat. The present invention has the advantages of compact structure, small size and convenient assembly and disassembly, and in the process of electrode introduction, the electrode rod only moves in a straight line without a downward pressing action, is not easy to deform, and also avoids the loss of the
graphite boat caused by the
impact of the electrode rod and the graphite boat.