Vapor deposition device, vapor deposition method, and organic el display device

A technology of evaporation and evaporation source, applied in lighting devices, vacuum evaporation coating, sputtering coating, etc., can solve the problems of difficulty in achieving high precision, obstacles to productivity and safety, increase in weight, etc., and achieve display quality. Excellent, excellent reliability, blur suppression effect

Active Publication Date: 2013-07-17
SHARP KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is difficult to perform high-precision patterning, and shifts in deposition positions and color mixing occur, making it difficult to achieve high-definition
[0011] In addition, when the mask is enlarged, the mask and the frame holding the mask become huge and their weight increases, so handling becomes difficult, which may hinder productivity and safety.
In addition, the vapor deposition device and its accompanying devices are similarly enlarged and complicated, so device design becomes difficult and installation costs become high.
[0012] Therefore, in the conventional coating evaporation methods described in Patent Documents 1 and 2, it is difficult to deal with large substrates, for example, for such large substrates exceeding 60 inches in size Substrates, it is difficult to perform separate coating evaporation at the mass production level

Method used

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  • Vapor deposition device, vapor deposition method, and organic el display device
  • Vapor deposition device, vapor deposition method, and organic el display device
  • Vapor deposition device, vapor deposition method, and organic el display device

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Embodiment approach 1）

[0163] Figure 10 It is a perspective view showing the basic configuration of the vapor deposition apparatus according to Embodiment 1 of the present invention. Figure 11 yes Figure 10 Front cross-sectional view of the vapor deposition device shown.

[0164] The vapor deposition unit 50 is constituted by the vapor deposition source 60 , the vapor deposition mask 70 , and the limiting plate unit 80 disposed therebetween. The substrate 10 moves at a constant speed along the arrow 10 a on the side opposite to the vapor deposition source 60 with respect to the vapor deposition mask 70 . For the convenience of the following description, it is assumed that the horizontal axis parallel to the moving direction 10a of the substrate 10 is the Y axis, the horizontal axis perpendicular to the Y axis is the X axis, and the vertical axis perpendicular to the X axis and the Y axis It is the XYZ orthogonal coordinate system of the Z axis. The Z axis is parallel to the normal direction o...

Embodiment approach 2）

[0193] Figure 15 It is an enlarged cross-sectional view of the vapor deposition apparatus according to Embodiment 2 of the present invention viewed in a direction parallel to the traveling direction of the substrate 10 . exist Figure 15 Among them, for the vapor deposition device shown in Embodiment 1 Figure 10 ~ Figure 12 Components that are the same as those shown in , are given the same symbols, and their descriptions are omitted. Hereinafter, Embodiment 2 will be described focusing on differences from Embodiment 1. FIG.

[0194] The second embodiment differs from the first embodiment in the cross-sectional shape of the limiting plate 81 of the limiting plate unit 80 along the XZ plane.

[0195] That is, if Figure 15 As shown, both ends in the vertical direction (Z-axis direction) of the side surface of the restricting plate 81 defining the restricting space 82 in the X-axis direction protrude toward the restricting space 82 , and the region between the two ends is ...

Embodiment approach 2

[0200] In addition, according to Embodiment 2, since the second surface 84b is formed below the first surface 84a (the vapor deposition source 60 side), even if a large amount of vapor deposition material adhering to the first surface 84a peels off and falls, the Since the vapor deposition material also falls on the second surface 84b and is captured, the possibility of falling on the vapor deposition source 60 is reduced. When the vapor deposition material peeled off from the restricting plate 81 falls on the vapor deposition source 60 and evaporates again, vapor deposition particles may adhere to undesired positions of the substrate 10 . In addition, when the vapor deposition material peeled off from the restricting plate 81 falls on the vapor deposition source opening 61 , the vapor deposition source opening 61 is blocked, and a film cannot be formed on a desired position of the substrate 10 . According to the second embodiment, the possibility of occurrence of such trouble...

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Abstract

In the present invention, a vapor deposition source (60), a limiting plate unit (80), and a vapor deposition mask (70) are disposed in the given order. The limiting plate unit is provided with a plurality of limiting plates (81) disposed in a first direction. Side walls of the limiting plates delimiting in the first direction a limiting space (82) between adjacent limiting plates in the first direction are configured in a manner so that a portion at which the dimensions in the first direction of the limiting space are broader than a narrowest section (81n) at which the dimensions in the first direction of the limiting space are narrowest is formed at least at the vapor deposition source side with respect to the narrowest section. As a result, it is possible to form a coating film having suppressed blurring at the edges at a desired position on a large substrate.

Description

technical field [0001] The present invention relates to a vapor deposition device and a vapor deposition method for forming a film of a predetermined pattern on a substrate. Also, the present invention relates to an organic EL (Electro Luminescence: electroluminescence) display device including a light emitting layer formed by vapor deposition. Background technique [0002] In recent years, flat panel displays have been used in various products and fields, and flat panel displays have been required to be larger in size, higher in image quality, and lower in power consumption. [0003] Under such circumstances, an organic EL display device equipped with an organic EL element using electro luminescence (Electro Luminescence) of an organic material is an all-solid-state flat panel that is capable of low-voltage drive, high-speed response, and self-luminescence. The display has received a high degree of attention. [0004] For example, in an active matrix organic EL display de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/04H01L51/00H01L51/50H05B33/10
CPCH01L51/50C23C14/12H01L51/56C23C14/243H01L51/0011C23C14/042C23F1/02H10K71/166H10K50/00H10K71/00H10K59/127H10K59/125H10K71/164
Inventor 川户伸一井上智园田通
Owner SHARP KK
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