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Piezoelectric-driven inchworm-type positioning table based on flexible amplification principle

A piezoelectric drive, worktable technology, applied in the parts of the instrument, instruments and other directions, can solve the problem of low movement speed, and achieve the effect of large bearing capacity, high positioning resolution and large stroke.

Inactive Publication Date: 2016-01-20
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But at present, the moving speed of the piezoelectric inchworm positioning table is relatively low. In order to solve this problem, the present invention has developed a new type of piezoelectric driven inchworm positioning table.

Method used

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  • Piezoelectric-driven inchworm-type positioning table based on flexible amplification principle
  • Piezoelectric-driven inchworm-type positioning table based on flexible amplification principle
  • Piezoelectric-driven inchworm-type positioning table based on flexible amplification principle

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] see Figure 1~Figure 8 , the piezoelectric-driven inchworm-type positioning workbench based on the principle of flexible amplification includes a guide adjustment mechanism 1 and an inchworm-type motion platform 2, and is characterized in that: the inner side of the inchworm-type motion platform 2 is connected to the guide adjustment mechanism 1, and the inchworm-type The timing control of the piezoelectric ceramics in the motion platform 2 enables the inchworm-type motion platform 2 to walk and position in a straight line along the guide adjustment mechanism 1 .

Embodiment 2

[0023] This embodiment is basically the same as Embodiment 1, and the special features are as follows:

[0024] The guide adjustment mechanism 1 includes a base 3, a reference baffle 4, an adjustment baffle 5, two pairs of cross roller guide rails 6 and 4 adjustment screws 7; the reference baffle 4 and the adjustment baffle 5 The upper and lower sides of the base 3 are respectively fixed by screws, and the outer guide rails of the upper half of the two pairs of cross roller guide rails 6 are fixed on the base 3 in close contact with the inside of the reference baffle 4 as a reference. The outer guide rail of the lower half of the cross roller guide 6 is connected with the base 3 by screws, and the screws cannot be tightened, so that the posture and posture of the outer guide rail of the lower half of the cross roller guide 6 can be adjusted; two pairs of cross roller guides The inner guide rail of the guide rail 6 is fixedly connected with the inchworm-type motion platform 2; ...

Embodiment 3

[0030] refer to figure 1 , a piezoelectric-driven inchworm-type positioning worktable based on the principle of flexible amplification, which is composed of a guide adjustment mechanism 1 and an inchworm-type motion platform 2 . The inchworm type motion platform 2 is connected with the inner side of the guide adjustment mechanism 1 through screws.

[0031] refer to figure 2 , The above-mentioned guide adjustment mechanism 1: consists of a base 3, a reference baffle 4, an adjustment baffle 5, two pairs of cross roller guide rails 6 and 4 adjustment screws 7. The reference baffle 4 and the adjustment baffle 5 are respectively fixed on the upper and lower sides of the base 3, and the outer guide rails of the upper half of the two pairs of cross roller guides 6 are fixed on the inside of the reference baffle 4 as a reference. On the base 3, the outer guide rails of the lower half of the two pairs of cross roller guide rails 6 are connected to the base 3 through screws, and the ...

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Abstract

The invention relates to a piezoelectrically-driven inchworm-type positioning workbench based on a flexible amplification principle. The piezoelectrically-driven inchworm-type positioning workbench comprises a guide adjustment mechanism and an inchworm-type moving platform. The guide adjustment mechanism guides the positioning workbench via cross roller guide ways, and the inchworm-type moving platform is guaranteed to move normally along the guide ways through a datum retaining plate, an adjustment retaining plate and adjusting screws. Clamping portions of a flexible mechanism in the inchworm-type moving platform are of a symmetrical level amplification mechanism, and an intermediate driving portion is of a composite bridge structure. Extension and shortening of three piezoelectric ceramics on the inchworm-type moving platform are controlled by a time sequence to complete linear travelling movements of the workbench. The inchworm-type positioning workbench has the advantages of large travel, high resolution, high bearing capacity, high moving speed, good directionality and the like.

Description

technical field [0001] The invention relates to a piezoelectric-driven inchworm-type positioning workbench based on the principle of flexible amplification, which is mainly used in the fields of aerospace, precision optical instruments, ultra-precision processing and the like. Background technique [0002] With the development of modern science and technology, precision positioning technology occupies an important position in aerospace, precision optical instruments, ultra-precision machining, etc. The traditional positioning workbench has a large volume and low resolution, and its limitations are becoming more and more obvious. At present, using the characteristics of piezoelectric materials such as fast response speed, high positioning accuracy, and no electromagnetic interference, piezoelectric drive worktables have become a research hotspot, including piezoelectric micro-displacement workbenches, piezoelectric ultrasonic workbenches, and piezoelectric inertial positionin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
Inventor 马立王坤周莎莎蒋晨阳谢炜刘波
Owner SHANGHAI UNIV
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