Method and system for scheduling multiple robot equipment cooperated for transferring wafers

A scheduling method and technology of a scheduling system, applied in the computer field, can solve the problems of complex scheduling and low efficiency, and achieve the effect of flexible configuration and improving work efficiency.

Active Publication Date: 2013-11-20
TSINGHUA UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0009] There are defects such as complex sche...

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  • Method and system for scheduling multiple robot equipment cooperated for transferring wafers
  • Method and system for scheduling multiple robot equipment cooperated for transferring wafers
  • Method and system for scheduling multiple robot equipment cooperated for transferring wafers

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Embodiment Construction

[0032] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0033] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or e...

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Abstract

The invention provides a method and a system for scheduling multiple robot equipment cooperated by transferring wafers. The method comprises the following steps of receiving tasks to be processed of the multiple robot equipment; configuring the multiple robot equipment and generating configuration information; generating a scheduling sequence for sequentially scheduling the multiple robot equipment according to the configuration information, a topological structure of the multiple robot equipment, a path list and a wafer list; carrying out scheduling control on the multiple robot equipment according to the scheduling sequence and the tasks to be processed of the multiple robot equipment to enable the multiple robot equipment to cooperatively finish the tasks to be processed. According to the method in the embodiment of the invention, the flexible configuration of the characteristics and the production path of the multiple robot equipment cooperated for transferring the wafers as well as the required information for processing the wafers is realized; meanwhile, the working efficiency of the robot equipment is increased.

Description

technical field [0001] The present invention relates to the field of computer technology, in particular to a method and system for scheduling multiple robot devices for collaborative film delivery. Background technique [0002] (1) Film transporting collaboration with multiple robotic devices [0003] Multiple robot scheduling devices include LoadPort, Robot1, Buffer, Loadlock, Robot2 and its surrounding PMs, Robot3 and its surrounding PMs. Among them, the LoadPort is used to place the Cassette holding the wafer, and its number and position can be configured. Robot1 rotation angular speed, up and down moving speed, stretching speed can be configured. When the wafer is imported, Robot1 can transfer the wafer from the Cassette on the LoadPort to the transmission Buffer or directly to the Loadlock1, and the Wafer determines whether it is configured through the incoming Buffer. When the wafer is sent out, the wafer can be transferred from Loadlock2 to the outgoing Buffer or d...

Claims

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Application Information

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IPC IPC(8): G05B19/418
CPCY02P90/02
Inventor 徐华袁源高士云
Owner TSINGHUA UNIV
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