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Software disconnection monitoring system and method

A monitoring system and disconnection technology, which is applied in the semiconductor field, can solve the problems of large system resource consumption, software performance waste, and short cycle time, so as to avoid errors that cannot read data changes, reduce the number of reads and writes, and save costs. Effect

Active Publication Date: 2016-08-31
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The disadvantage of the existing technology is: because the monitoring software and the monitored software receive data at the same cycle, the monitoring cycle is short. If it is judged that there is a disconnection, an alarm will be thrown according to the situation. Such an operation is very important for the control of the entire device. For the software, it will consume a lot of system resources, and it is also a big waste of software performance.
In addition, this method will appear that when the data read by the monitoring software is about to start or end to change (that is, the rising or falling edge of the data transmission waveform), the read data will not change, and it will always be the same value, so will lead to misjudgment
Moreover, the higher the frequency of data reading, the greater the probability of reading errors, and the greater the probability of erroneous judgments.

Method used

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  • Software disconnection monitoring system and method

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Embodiment Construction

[0036] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0037] In the description of the present invention, it should be understood that the terms "first" and "second" are used for description purposes only, and should not be understood as indicating or implying relative importance.

[0038] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connect...

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Abstract

The invention provides a software disconnection monitoring method. The software disconnection monitoring method includes the following steps that software to be tested changes sent data with a first period T1 through a sending module; a receiving module obtains the sent data changed by the sending module with a second period T2, wherein N*T1<T2<(N+1)*T1 and N is a positive integer; whether the software to be tested undergoes disconnection or not is judged based on the obtained sent data. With the software disconnection monitoring method, the number of times in reading and writing the data is reduced, cost is saved, the error probability is greatly reduced, disconnection occurring is determined more effectively. The invention further provides a software disconnection monitoring system.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a software disconnection monitoring system and method. Background technique [0002] In the fields of semiconductor production such as etching and solar energy, equipment-side software includes equipment control software, data acquisition software, and CTC (Cluster Tool Controller, cluster equipment controller) software, etc. These software need to keep connected, exchange data and various services, and coordinate to complete the production and product quality control of the entire equipment. These software are distributed on different computers, and data exchange is performed through the network. During the production process of the equipment, it is necessary to ensure that the connection of each software must be normal. The equipment-side control software is responsible for controlling the Wafer (wafer) etching process, recording various process parameters and sending t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F11/30
Inventor 张继宏
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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