The invention discloses a matching method for automatic matcher equipment, which relates to the technical field of
radio frequency impedance matching and is applied to
radio frequency impedance matching equipment, and the
radio frequency impedance matching equipment is used for connecting a radio frequency
output device and a
plasma load and controlling the output power of the radio frequency
output device to be effectively transmitted to the
plasma load. According to the matching method for the automatic matcher equipment, parameter scanning is carried out on two adjustable vacuum capacitors through a two-dimensional optimization scanning
algorithm, and target matching parameters are found in advance and stored in a nonvolatile storage module; after the
plasma generating device is started, the
central processing unit does not need to re-execute full-range scanning, can directly call pre-stored parameters, and controls the
capacitor driving mechanism to be quickly adjusted to a target state; even if the initial matching parameters are called in an extreme scene and secondary
fine tuning is started, the problem of unstable power caused by scanning
lag in an existing scheme is avoided, and the strict requirement of a high-precision process for ignition, namely stability, is met.