Horizontal multi-arc coating chamber

Abstract

The invention discloses a horizontal multi-arc coating chamber which is provided with a coating chamber tank body, wherein the coating chamber tank body is provided with an outer wall, a middle cooling jacket layer and an inner wall; arc source mounting holes are uniformly formed in the upper and lower part walls of the coating chamber tank body; a mounting bracket is arranged at the bottom of the coating chamber tank body; each arc source mounting hole comprises a mounting outer wall connected with the outer wall of the coating chamber tank body, a mounting inner wall connected with the inner wall of the coating chamber tank body and a mounting jacket layer communicated with the middle cooling jacket layer of the coating chamber tank body; the mounting inner walls extend out of the inner wall of the coating chamber tank body and extend into the coating chamber tank body. In the horizontal multi-arc coating chamber with the structure, since the mounting inner walls of the arc mounting holes extend out of the inner wall of the coating chamber tank body and extend into the coating chamber tank body, the dust in the coating chamber tank body does not splash down into an arc source due to the blockage of the extending mounting inner walls in a coating process, short circuit between a metal block in the arc source and a shielding case is avoided, and then normal coating operation of the coating chamber is not influenced.

Description

technical field [0001] The invention relates to a horizontal multi-arc coating chamber. Background technique [0002] The horizontal multi-arc coating chamber in the prior art has a coating chamber tank body, the coating chamber tank body has an outer wall, an intermediate cooling jacket and an inner wall, and arc source installation holes are evenly distributed on the upper and lower walls of the coating chamber tank body , the bottom of the coating chamber tank body has a mounting bracket, and the arc source installation hole includes an installation outer wall connected to the outer wall of the coating chamber tank body, an installation inner wall connected to the inner wall of the coating chamber tank body, and an intercooler with the coating chamber tank body In the horizontal multi-arc coating chamber in the prior art, the installation inner wall of the arc source installation hole is welded to the inner wall of the coating chamber tank, and there is dust in the coatin...

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a horizontal bed that prevents the dust from falling into the source of the arc after being splashed in the tank body of the coating chamber during coating, and thus does not affect the normal operation of the coating chamber due to short circuit during the coating process due to dust pollution. multi-arc coating chamber

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