Axial macro-micro adjusting device for optical element in photoetching projection objective lens system
A technology for lithography projection and optical components, which is applied in the direction of optical components, microlithography exposure equipment, photo-plate making process exposure devices, etc., can solve the problems of small adjustment stroke and tilt error, so as to avoid damage, eliminate tilt error, and quickly The effect of large stroke adjustment
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0016] The present invention will be further described below in conjunction with the accompanying drawings.
[0017] like figure 1 As shown, the axial macro-fine adjustment device of optical elements in the lithography projection objective lens system includes a capacitive sensor 1, a frame 3, a macro-fine adjustment mechanism 4 and a guide rail 5, and the capacitive sensor 1 is arranged above the frame 3 for detecting The moving distance of the picture frame 3; the macro-micro adjustment mechanism 4 is arranged under the frame of the picture frame 3, and is used for the macro-fine adjustment of the picture frame 3; The optical elements 2 are arranged in the mirror frame 3 and bonded together by structural glue.
[0018] like figure 2 As shown, there are three bosses 3-1 and three guide bosses 3-2 on the picture frame 3, which are respectively distributed along the circumferential direction of the picture frame at 120°, and the adjacent bosses 3-1 and guide bosses 3-2 The ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com