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a spraying device

A spray device and spray head technology, applied in the direction of spray devices, liquid spray devices, chemical instruments and methods, etc., can solve problems such as incoherent process, complicated control process, increased probability of equipment failure, etc., and achieve equipment failure The effect of reducing the occurrence rate and reducing the manufacturing cost

Active Publication Date: 2016-12-21
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The independent movement of each independent unit in the production process has the following disadvantages: (1) it will cause the entire process to be incoherent; (2) the separate control of multiple independent units will make the control process too complicated; (3) multiple independent units Causes difficulty in equipment maintenance; (4) Multiple independent units will increase the probability of equipment failure

Method used

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Embodiment Construction

[0026] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] like figure 1 As shown, a sprinkler device includes: a shower head 1 for spraying water, chemical reagents and blowing air, a fixed frame 2 for fixing the shower head 1, a rotary actuator, a lifting actuator and a The receiving tank 3 for spraying liquid medicine, the spray head 1 is connected with the lifting actuator through the rotary actuator, and the fixed frame 2 is connected with the rotary actuator; the rotary actuator and the lifting actuator are electric Or pneumatic. The rotary actuator includes: a swing arm 8, a rotary shaft 9, a coupling 10 and a rotary drive motor 11, one end of the swing arm 8 is connected to the fixed frame 2, and the other end is ...

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Abstract

The invention discloses a spraying device. The spraying device comprises a spraying head, a rotary execution mechanism, a lifting execution mechanism and a containing tank used for containing spraying pesticide, wherein the spraying head is connected with the lifting execution mechanism through the rotary execution mechanism. The spraying device enables the whole cleaning process to be continuous, and reduces manufacturing cost, equipment breakdown occurrence rate and maintenance expenses.

Description

technical field [0001] The invention relates to the technical field of spraying devices, in particular to a spraying device. Background technique [0002] With the increasingly fierce competition in the semiconductor market, major semiconductor manufacturers have higher and higher requirements for equipment performance and production efficiency. Cleaning machines account for the largest proportion of all equipment in semiconductor factories. In recent years, single-wafer cleaning equipment has been more and more widely used in silicon wafer cleaning. Single chip cleaning equipment uses water, alkaline reagents, acidic reagents and nitrogen gas in the drying process in the process of cleaning silicon wafers. In addition, the standard No. 1 liquid combined with the megasonic energy field can produce good cleaning effects, making The application of megasonic cleaning is also quite extensive. In the chemical liquid spraying system in the current single-chip cleaning equipment,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B3/02B05B17/06B05B15/08B05B15/68
CPCB05B15/68B05B17/06B08B3/02B08B2203/0217B08B2203/0288
Inventor 王波雷吴仪李伟王浩张豹
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD