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Heat Exchangers for Excimer Lasers

An excimer laser and heat exchanger technology, applied in lasers, phonon exciters, laser parts, etc., can solve the problems of poor gas flow uniformity, large aerodynamic resistance of circular tubes, and reduced heat transfer performance, and achieve improved heat dissipation. performance, increased airflow, reduced drag effects

Active Publication Date: 2016-06-08
RAINBOW SOURCE LASER RSLASER
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  • Abstract
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  • Claims
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Problems solved by technology

When the high-speed air flow passes over the circular tube, the area of ​​the low-velocity area and the wake area before the stagnation point is relatively large, resulting in a low local convective heat transfer coefficient on the adjacent rib surface, thereby reducing the heat transfer performance; and the circular tube has a large aerodynamic drag
[0005] In addition, the uniformity of the gas flow rate in the discharge area of ​​the current cavity is poor, and the heat exchanger is an important source of gas circulation resistance inside the cavity, which needs to be co-designed with the flow field

Method used

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  • Heat Exchangers for Excimer Lasers
  • Heat Exchangers for Excimer Lasers
  • Heat Exchangers for Excimer Lasers

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Embodiment Construction

[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0027] like figure 1 As shown, the excimer laser discharge cavity is mainly composed of a sealed cavity 1 , a discharge electrode 2 , a fan system 3 and a heat exchanger 4 .

[0028] Among them, the heat exchanger 4 is used to cool the high-speed circulating gas in the discharge chamber, and control the temperature of the gas within a reasonable range, so as to ensure that the laser has a high energy conversion efficiency.

[0029] like figure 2 As shown, the heat exchanger provided by the present invention is composed of a cooling pipe 5 , a plurality of fins 6 and two end flanges 7 . The cooling pipe 5 is a hollow pipe for containing circulating cooling water, including a pipe wall made of metal materials such as cop...

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Abstract

The invention discloses a heat exchanger which is suitable for the gas laser and particularly for an excimer laser. The cooling pipe of the heat exchanger adopts an elliptic tube, and the outer diameter of the annular rib of the heat exchanger changes along the principal axis direction of the heat exchanger, wherein the outer diameters of two ends are smaller, and the outer diameter of the middle region is larger. The outer diameter variable type annular rib type elliptic tube type heat exchanger provided in the invention can be used to effectively improve the heat exchange performance of the heat exchanger, reduce the gas circulation resistance, and improve the flow velocity and uniformity of the gas in the high discharge region.

Description

technical field [0001] The invention relates to a heat exchanger suitable for gas lasers, especially excimer lasers. Background technique [0002] Excimer lasers have short wavelengths, high repetition rates, and can be scaled and amplified. They are excellent laser light sources for lithography. A typical discharge-pumped excimer laser is mainly composed of a high-voltage pulse source and a discharge cavity, and the discharge cavity includes a sealed cavity, a discharge electrode, a gas circulation system, and a heat dissipation system. [0003] The energy conversion efficiency of excimer lasers is low, and most of the input electric energy is converted into heat. If the heat cannot be dissipated in time, the temperature of the working gas will rise rapidly, which will greatly affect the efficiency of the laser and even damage the laser. . As the most important heat dissipation component, the heat exchanger takes away the heat in the laser through water cooling. [0004]...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/041H01S3/036
Inventor 王魁波丁金滨刘斌王宇周翊赵江山
Owner RAINBOW SOURCE LASER RSLASER
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