Linear capacitive microwave power sensor based on mems structure

A technology of linear capacitance and microwave power, which is applied in the direction of measuring electric power, instruments, electric vehicles, etc., can solve the problems of microwave signal consumption, etc., and achieve the effect of improving sensitivity, expanding application range, and high sensitivity

Inactive Publication Date: 2016-06-29
SOUTHEAST UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement

Method used

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  • Linear capacitive microwave power sensor based on mems structure
  • Linear capacitive microwave power sensor based on mems structure

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with the accompanying drawings.

[0017] The linear capacitive microwave power sensor of the present invention uses GaAs or Si material as substrate 5, and is provided with microstrip line 1, cantilever beam anchor region 2, cantilever beam 3, sensing electrode 4 on substrate 5, and sensing electrode 4 is formed by sensing The electrode metal 41 and the sensing electrode insulating layer 42 are formed. The cantilever beam anchor area 2 and the sensing electrode 4 are respectively arranged on both sides of the microstrip line. There is a layer of sensing electrode insulating layer 42 above the sensing electrode metal 41. An irregular shape cantilever beam 3 is arranged above the microstrip line 1. The cantilever beam 3 One end of the cantilever is set on the anchor area 2 of the cantilever beam, and the other end is correspondingly suspended above the sensing electrode 4 . The microwave power sensor se...

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Abstract

The invention discloses a linear capacitor type microwave power sensor based on an MEMS (Micro Electro Mechanical System) structure. The linear capacitor type microwave power sensor comprises a substrate, as well as a cantilever beam anchor region, a microstrip line and a sensing electrode which are sequentially arranged on the substrate, as well as an irregular-shape cantilever beam arranged above the microstrip line, wherein one end of the cantilever beam is connected with the cantilever beam anchor region, and the other end of the cantilever beam is correspondingly suspended above the sensing electrode. The cantilever beam suspended above the microstrip line is used for sensing the microwave power and generating bending; by virtue of the capacitance formed by virtue of contact of the cantilever beam and the sensing electrode, measurement of the microwave power is realized; meanwhile, by virtue of irregular shape of the cantilever beam and 'zipper-type' movement of contact between the free end of the cantilever beam and the sensing electrode, linear output between the contact capacitance and the microwave power is realized; the linear capacitor type microwave power sensor disclosed by the invention can be used for realizing linear output, reducing requirements on a later processing circuit and a calibration test and expanding the application range of the sensor.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and relates to a structure for measuring microwave power transmitted on a microstrip line. Background technique [0002] In microwave technology research, microwave power is an important parameter to characterize microwave signal characteristics. In microwave wireless application and measurement technology, the detection of microwave power is a very important part. The traditional technology for measuring microwave power is based on thermistors, thermocouples or diodes, and these are terminal devices, and the microwave signal will be completely consumed in the power measurement. In recent years, three types of online microwave power sensor structures based on MEMS (Chinese) technology have been proposed at home and abroad: one is to use the ohmic loss on the coplanar waveguide signal line, and convert it into thermoelectric potential by placing a nearby thermal pile output; the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R21/00
Inventor 韩磊
Owner SOUTHEAST UNIV
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