A multi-degree-of-freedom precision adjustment mechanism

Abstract

A multi-degree-of-freedom precision adjustment mechanism, including a connection structure, an inclined flexible support structure, a displacement flexible support structure and a fixing mechanism. Including inclined support frame, Rx drive device and Ry drive device, the displacement flexible support structure includes displacement support frame, X-direction drive device and Y-direction drive device, the fixing mechanism includes support seat, wedge block and fixed frame, and the fixed frame is used to fix the quilt The adjustment element is connected between the surface spring inner ring fixing clip and the fixed frame, the inclined support frame is connected with the displacement support frame, and the displacement support frame and the support seat are attached by the clamping force between the fixed frame and the surface spring inner ring fixing clip. Fitting, connection between the support seat and the wedge block, fit and positioning between the wedge block and the fixed frame.

Description

technical field [0001] The invention relates to the field of photolithography, in particular to a multi-degree-of-freedom precision adjustment mechanism used in photolithography instruments. Background technique [0002] In micro-displacement technology, the types of mechanical micro-displacement commonly used include cams, inclined planes, precision nut pairs, and elastic deformation structures, and the use of one of the structural stacks or the combination of several structures can be designed into multi-degree-of-freedom kinematics Fine adjustment mechanism. [0003] In the field of photoelectric detection, high-precision positioning and installation are usually required for components in precision instruments and equipment. When the required precision cannot be guaranteed during processing, various precision adjustment mechanisms are often used to achieve it. For the adjustment mechanism, these requirements should be met as much as possible: multiple degrees of freedom,...

AI Technical Summary

Problems solved by technology

[0004] In the existing installation and adjustment mechanism, it is often difficult to meet the above requirements for the adjustment structure at the same time. In the precision adjustment of multiple degrees of freedom, the following problems often exist:

[0005] 1. The adjustment is not completely decoupled, and the adjustment of a certain degree of freedom affects the accuracy of other degrees of freedom, such as the tilt and rotation centers do not coincide;

[0006] 2. There are too many stacked combinations and complex structures, which do not meet the space requirements and stability requirements;

[0007] 3. The adjustment is inconvenient, there is no setting of initial adjustment and fine adjustment steps

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