Novel quartz boat suitable for atmospheric pressure furnace

A technology for quartz boats and pressure furnaces, applied in the field of new structures, which can solve problems such as the expansion of the gap between the slot rods 10, the damage and deformation of silicon wafers and quartz boat transmission manipulators, etc., to reduce production costs, prevent damage to equipment, and prolong deformation. cycle effect

Inactive Publication Date: 2014-07-16
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There is no lateral support between the adjacent trough rods 10 on the quartz boat. Therefore, due to the high temperature environment in the furnace for a long time, the quartz boat is prone to deformation after being used for a period of time, such as its trough rods. 10, the gap between the card slots on the 10 will expand, etc., then, when the silicon wafer is pushed according to the originally set parameters, the edge of the silicon wafer may not touch the card slot and fall, causing silicon wafers, quartz boats, transfer manipulators or atmospheric pressure furnaces to fall. Wait for damage to occur

Method used

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  • Novel quartz boat suitable for atmospheric pressure furnace
  • Novel quartz boat suitable for atmospheric pressure furnace
  • Novel quartz boat suitable for atmospheric pressure furnace

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Embodiment Construction

[0019] Cooperate see image 3 , Figure 4 As shown, in a kind of quartz boat provided by the present invention, on the basis of the original structure, several auxiliary struts 40 connected between the two frames 20 of the quartz boat are added, and several auxiliary struts 40 connected between the auxiliary struts 40 and corresponding grooves are added. A plurality of support bars 50 between the bars 10 .

[0020] In a preferred embodiment, two auxiliary struts 40 that are parallel to each other with the three grooved rods 10 of the quartz boat are provided, and these auxiliary struts 40 are also distributed on the outer circumference of the frame 20, and the first auxiliary strut wherein The support bar 40 is located between the first channel bar 11 and the second channel bar 12 , and the second auxiliary support bar 40 is located between the first channel bar 11 and the third channel bar 13 .

[0021] In this embodiment, at least between the second slot bar 12 and the fir...

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Abstract

The invention relates to a novel quartz boat suitable for an atmospheric pressure furnace. On the original basis, two auxiliary supporting rods which are placed between a first groove rod and a second groove rod and between the first groove rod and a third groove rod respectively are additionally arranged, and a plurality of supporting strips are at least arranged between the second groove rod and the auxiliary supporting rod adjacent to the second groove rod and between the third groove rod and the other auxiliary supporting rod adjacent to the third groove rod respectively. Accordingly, the deformation period of the quartz boat under a high temperature environment in the furnace is prolonged, the condition that silicon slices fall to damage equipment is avoided, production efficiency is improved, and production cost is lowered.

Description

technical field [0001] In particular, the present invention relates to a novel construction of quartz boats for holding silicon wafers in atmospheric pressure furnaces. Background technique [0002] In semiconductor manufacturing, a quartz boat is a device used to place multiple silicon wafers at intervals in processing equipment such as an atmospheric pressure furnace (AP FNC, atmosphere pressure furnace). [0003] Such as figure 1 , figure 2 Shown is the structure diagram of existing a kind of quartz boat, and this quartz boat is provided with three groove bars 10 parallel to each other, is referred to as the first groove bar 11, the second groove bar 12 and the 3rd groove bar 13; A substantially annular frame 20 with the same shape and size, these two frames 20 are perpendicular to the groove bar 10, and are respectively fixedly connected to the two ends of the length direction of the three groove bars 10, and the three groove bars 10 are fixedly connected The rods 10...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/673
CPCH01L21/67309
Inventor 潘琦顾武强李占斌王强周维文
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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