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Magnetic device and OLED evaporation device

A magnetic device and evaporation technology, applied in the field of OLED evaporation, can solve the problem of inconvenient change of magnetic poles and the like

Inactive Publication Date: 2014-07-30
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

And especially to absorb different high-precision masks, different magnetic pole arrangements need to be selected. The existing magnetic device cannot easily change the magnetic poles, and the magnetic poles can only be replaced by replacing the magnetic device.

Method used

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  • Magnetic device and OLED evaporation device
  • Magnetic device and OLED evaporation device
  • Magnetic device and OLED evaporation device

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Embodiment Construction

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0027] like figure 2 As shown, the magnetic device described in the embodiment of the present invention is used to adsorb a metal mask in an OLED evaporation device, including:

[0028] Metal plate( figure 2 not shown in);

[0029] an electromagnet array 21 comprising a plurality of electromagnets;

[0030] Each electromagnet is inserted on the metal plate; the two magnetic poles of each electromagnet are located on both sides of the metal plate ( figur...

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Abstract

The invention provides a magnetic device and an OLED evaporation device. The magnetic device is used for adsorbing a metal mask from the OLED evaporation device, and comprises a metal plate, an electromagnet array comprising a plurality of electromagnets each inserted on the metal plate, a power supply module for providing current, a control module for controlling the power supply module to add direct current into all or part of the plurality of electromagnets by sending a first control signal to the power supply module when the metal mask is adsorbed in an OLED evaporation process and controlling the direction and the value of the direct current, wherein two magnetic poles of each electromagnet are arranged on two sides of the metal plate respectively. According to the magnetic device, the magnetic field intensity and the magnetic pole distribution for adsorbing the metal mask can be changed during OLED evaporation.

Description

technical field [0001] The invention relates to the technical field of OLED evaporation, in particular to a magnetic device and an OLED evaporation device. Background technique [0002] In the field of OLED (Organic Light Emitting Diode) display product production, the production of OLED products by evaporation is a relatively mature method. When using the evaporation method to make OLED devices, a metal mask should be used. At the same time, in order to prevent the metal mask from bending under the action of gravity when the area is large, a magnetic device should be added to the OLED evaporation device to carry out the metal mask. adsorption. [0003] like figure 1 As shown, the magnetic device in the existing OLED vapor deposition device adopts multiple rows of single-pole permanent magnets arranged on the metal plate 11, and the magnetic poles of the single-pole permanent magnets in adjacent rows are different. figure 1 The electromagnets marked with N in the middle i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/54
CPCC23C14/042C23C14/12C23C14/54
Inventor 赵德江高浩然于建伟殷杰
Owner BOE TECH GRP CO LTD
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