An identification device and identification method for laser damage to an optical thin film
A technology of optical thin films and identification devices, which is applied in measuring devices, scientific instruments, and material analysis through electromagnetic means, can solve problems such as atmospheric breakdown and plasma flash, and achieve fast identification, high identification accuracy, and small interference Effect
Active Publication Date: 2016-08-24
XIAN TECH UNIV
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Problems solved by technology
However, when the intensity of the laser is high enough, the atmosphere also breaks down and a plasma flash occurs
When a strong laser acts on the surface of a thin film and a plasma flash occurs, in most cases, the compound plasma of the thin film and the atmosphere is obtained, or only the atmospheric plasma flash is obtained. Therefore, the method of detecting light intensity is used to detect It is inevitable to judge whether the film is damaged or not, resulting in "misjudgment" in the actual test
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[0026] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0027] see figure 1 , the identification device of optical film laser damage of the present invention comprises laser 1 and test sample 2, laser 1 is a high-energy laser that can damage the surface film of test sample 2, and the wavelength of the laser is 1064nm, the pulse width is 10ns, and the maximum single pulse The energy is 400mJ; the test sample 2 is installed on the test sample stage 9, and the test sample stage 9 is a two-dimensional moving platform controlled by a stepping motor; the laser 1 is facing the surface to be tested of the test sample 2, and one side of the test sample stage 9 is An accelerating electrode 4 for accelerating the particles sputtered by the laser irradiated sample and forming a collimated particle beam is provided, and an electron source 3 for increasing the ion content is also provided between the test sample stage 9 and the accelera...
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Abstract
The invention discloses a method and a device for identifying laser damages to an optical film. The types of elements contained in damaged materials can be determined by acquiring mass-to-charge ratio distribution and performing mass spectrometric analysis and element judgment through computer software, so that damages to the film can be judged accurately and rapidly on line. The device adopting the method consists of a test sample stage, a mass-to-charge ratio acquisition system and a computer operation system. By adopting the method and the device, the damage state of the film or an optical element under strong laser light can be judged rapidly and accurately on line in real time. By applying the method to laser damage threshold test, integration, automation and intelligence of a test system can be realized.
Description
technical field [0001] The invention belongs to the technical field of optical film detection, and relates to a method for judging damage of an optical film, in particular to an identification device and an identification method for laser damage of an optical film. Background technique [0002] In the high-energy laser system, there are various optical components and thin-film devices, and the anti-laser damage performance of these components is inseparable from the normal and effective operation of the optical system. Laser damage threshold (LIDT) is an important indicator to measure the performance of thin films and optical components, but there are still many problems in the test of laser damage threshold. In the process of laser damage threshold testing, how to accurately, real-time, fast, and online discriminate film damage has become a core part of the research. Therefore, in order to obtain the laser damage threshold of the thin film, the first condition is to quickl...
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IPC IPC(8): G01N27/64
Inventor 苏俊宏徐均琪惠迎雪梁海锋杨利红李建超
Owner XIAN TECH UNIV