A three-dimensional active stabilization control recording method for holographic gratings

An active stabilization and recording control technology, applied in the direction of diffraction gratings, instruments, etc., can solve the problems of prolonging the holographic exposure time and affecting the shape of the holographic grating mask, so as to achieve the effect of improving stability

Active Publication Date: 2017-04-12
SUZHOU UNIV
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Problems solved by technology

With the increase of the grating aperture, the interference optical path becomes huge, and the holographic exposure time will be greatly extended. When the interference fringe density of holographic recording is relatively high, such as the grating period is on the sub-micron scale, and the grating aperture is in the meter-scale range, the holographic recording The cumulative effect of tens of nanometers of movement changes in the interference light field will seriously affect the morphology of the holographic grating mask

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  • A three-dimensional active stabilization control recording method for holographic gratings
  • A three-dimensional active stabilization control recording method for holographic gratings
  • A three-dimensional active stabilization control recording method for holographic gratings

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Embodiment 1

[0029] Embodiment one: attached figure 1 is a schematic diagram of moiré fringes, see appendix figure 2 to attach Figure 8 As shown, a holographic grating three-dimensional active stable control recording method, the aperture of the main grating to be recorded is 400mm×1000mm, and the grating space frequency is 1740Line / mm. The grating recording process includes the following steps:

[0030] (1) As attached figure 2 As shown, it is a schematic diagram of the principle of interference light field control in this embodiment. In the holographic interference recording light field, two reference grating dry plates are set horizontally and vertically on the side of the main grating dry plate 1 to be placed, and then the two reference gratings are simultaneously controlled. The dry plate is exposed, the incident angle of the first recording light beam 7 and the second recording light beam 8 relative to the holographic grating dry plate is 21.06 degrees, and the wavelength of the...

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Abstract

The invention discloses a three-dimensional active stable control recording method for a holographic grating, specifically: (1) preparing two reference gratings; (2) obtaining the Moiré fringes of the two reference gratings; (3) placing a master in the holographic recording optical path Grating dry plate, turn on the interference recording light, record the moire fringe image formed by the recording light field and two reference gratings, and obtain the reference image; (4) record the moiré fringe image formed by the recording light field and two reference gratings in real time; (5) Compared with the reference image, the movement information of the moiré fringe image is obtained, and the compensation device is adjusted and controlled in real time to realize that the real-time moiré fringe image is consistent with the reference image; (6) the set exposure time is reached, and the main grating is obtained through development. The invention controls the interference light field through three-dimensional active stabilization, so that when the recording light field changes relative to the grating substrate, real-time dynamic compensation can be realized in the long-time exposure process, and the stability of large-diameter grating holographic recording can be improved.

Description

technical field [0001] The invention relates to a three-dimensional active stable control recording method of a holographic grating, which is used to realize long-time holographic exposure recording of a large-diameter grating. Background technique [0002] Large-aperture pulse compression grating is the key component to realize ultrafast and ultraintense pulse laser. In ultra-high-power petawatt-level laser devices, the requirements for the aperture of the grating have reached the meter level. With the increase of the grating aperture, the interference optical path becomes huge, and the holographic exposure time will be greatly extended. When the interference fringe density of holographic recording is relatively high, such as the grating period is on the sub-micron scale, and the grating aperture is in the meter-scale range, the holographic recording The cumulative effect of tens of nanometer motion changes of the interference light field will seriously affect the morpholo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03H1/12G02B5/18
Inventor 李朝明吴建宏陈新荣
Owner SUZHOU UNIV
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