Semiconductor sensor calibration device, system and method
A technology for calibrating devices and sensors, which is applied in the direction of instruments, etc., can solve the problems of high cost and large volume, and achieve the effect of reducing production costs
Active Publication Date: 2016-11-30
HANGZHOU SILAN MICROELECTRONICS
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Problems solved by technology
Such equipment is bulky and expensive
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[0053]Various embodiments of the invention will be described in more detail below with reference to the accompanying drawings. In the various drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale.
[0054] figure 2 is a schematic diagram of a semiconductor sensor calibration system according to the first embodiment of the present invention. image 3 is a schematic diagram of a semiconductor sensor calibration device according to the first embodiment of the present invention. The semiconductor sensor calibration system includes a first external physical quantity generation device 21 , a semiconductor sensor calibration device 22 and a semiconductor sensor to be calibrated 23 .
[0055] The first external physical quantity generating device 21 is used for generating an external physical quantity with a first error. In this embodiment, the calibration accuracy doe...
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A semiconductor sensor calibration device, system and method are disclosed. The semiconductor sensor calibration device includes: a test socket for connecting a semiconductor sensor to be calibrated, and transmitting to a processor a measured value to be calibrated obtained by measuring the semiconductor sensor to be calibrated; a reference sensor , for obtaining reference measurement values according to external physical quantities; non-volatile memory, for storing pre-measured correction compensation values corresponding to each reference measurement value; processor, respectively communicating with the test socket, reference sensor and non-volatile The volatile memory is connected, and the corresponding correction compensation value is queried according to the reference measurement value, and the precise value of the external physical quantity is calculated according to the reference measurement value and the corresponding correction compensation value, and the precise value of the external physical quantity and the to-be-calibrated The measured value is calibrated. The solution does not rely on accurate external physical quantity input and can accurately calibrate and calibrate semiconductor sensors, thereby reducing production costs.
Description
technical field [0001] The invention relates to semiconductor sensor technology, in particular to a semiconductor sensor calibration device, system and method. Background technique [0002] After the manufacturing is completed, there is an error in the output of the semiconductor sensor, and it needs to be calibrated before leaving the factory. [0003] figure 1 It is a schematic diagram of the structure of a semiconductor sensor. like figure 1 As shown, the semiconductor sensor includes a physical quantity conversion unit 11 , a non-volatile memory 12 , a calibration register 13 , a digital-to-analog converter 14 , an operational amplifier 15 and an analog-to-digital converter 16 . The physical quantity conversion part 11 measures the external physical quantity, converts it into an electrical signal and outputs it to the operational amplifier 15, and at the same time, the calibration register 13 reads the calibration value stored in the non-volatile memory 12, and conver...
Claims
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IPC IPC(8): G01D18/00
Inventor 张波蒋登峰魏建中
Owner HANGZHOU SILAN MICROELECTRONICS