Supercharge Your Innovation With Domain-Expert AI Agents!

Small capacitance compensation circuit of micro mechanical accelerometer

A technology of accelerometer and small capacitor, which is applied in the direction of measuring acceleration, speed/acceleration/shock measurement, measuring device, etc. It can solve problems such as inability to compensate for small capacitors, and achieve the effect of precise matching

Active Publication Date: 2014-08-06
BEIJING ZHELANG TECH
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Therefore, in order to solve the above-mentioned problems, the present invention proposes a method for small capacitance compensation of a micromechanical accelerometer, which is a two-step small capacitance compensation method, which solves the problem that the small capacitance cannot be compensated inside the integrated circuit

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Small capacitance compensation circuit of micro mechanical accelerometer
  • Small capacitance compensation circuit of micro mechanical accelerometer
  • Small capacitance compensation circuit of micro mechanical accelerometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0011] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. The following preferred embodiments are provided only for a better understanding of the present invention. Therefore, the present invention is not limited to these preferred embodiments, and these preferred embodiments can be modified without departing from the scope and spirit of the present invention disclosed in the appended claims.

[0012] The specific implementation is as follows:

[0013] figure 1 It is the schematic diagram and electrical model of the micromechanical accelerometer. As shown in the figure, the schematic diagram of the micromechanical accelerometer (1), the accelerometer consists of three layers of wafers as the upper plate (2), the middle plate (3), And the lower plate (4). The three polar plates are composed of two capacitors that change with the acceleration shown in (10).

[0014] figure 2 It is the circuit principle diagram of ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a method for a small capacitance compensation circuit of a micro mechanical accelerometer. The method is a two-step type small capacitance compensation method. The problem that small capacitances cannot be compensated in an integrated circuit is solved. Through the compensating method, aF-magnitude capacitances can be accurately compensated in the integrated circuit. According to the technical scheme, front-level amplification is performed on an acceleration signal firstly, capacitance mismatching can be partly compensated, the capacitance mismatching is amplified due to the signal amplification effect, and therefore, the large capacitance is used for compensating the small capacitance mismatching value in the second-level amplification part. The method has the advantages that the micro capacitance compensating (aF magnitude) can be achieved inside the integrated circuit, and therefore precise matching of the micro mechanical accelerometer and other capacitance sensors can be achieved.

Description

Technical field [0001] The invention relates to a method for realizing small capacitance compensation in a micromechanical accelerometer interface circuit. Background technique [0002] At present, micromechanical accelerometers usually consist of three polar plates with two or more capacitors that vary with acceleration. Due to the inconsistency of these capacitance values ​​during the design and production process, the output signal will be out of adjustment. The prior art solves this problem by using a method of parallel capacitance between the upper plate and the middle plate or the middle plate and the lower plate of the accelerometer. As the size of micromechanical accelerometers continues to decrease, the required compensation capacitance value also decreases, and it is currently smaller than the smallest capacitance value (usually 25fF) that can be implemented inside an integrated circuit. The method of realizing small capacitance through series connection will introduc...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01P15/125
Inventor 江山
Owner BEIJING ZHELANG TECH
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com