Method for aligning reticle and substrate and method for manufacturing color filter substrate

Abstract

The invention discloses a method for aligning a mask to a substrate and a manufacturing method of a colored film substrate. The method for aligning includes the steps that at least one substrate aligning mark set is formed on the substrate and comprises n substrate aligning marks of X kinds of appearances, wherein n is the number of sub pixels included by each pixel and is a natural number larger than or equal to 3, and X is a natural number smaller than or equal to n; mask aligning mark sets corresponding to the substrate aligning mark sets in an one-to-one mode are formed on the mask and include n mask aligning marks of Y kinds of appearances, wherein Y is a natural number smaller than or equal to n and the multiplication of X and Y is larger than or equal to n; the mask aligning mark sets are aligned to the corresponding substrate aligning mark sets, and each mask aligning mark is aligned to one substrate aligning mark to form n different aligning appearances. The manufacturing method includes the aligning method. The method for aligning the mask to the substrate and the manufacturing method of the colored film substrate facilitate confirmation of aligning.

Description

technical field [0001] The invention relates to the field of manufacturing color filter substrates, in particular to a method for aligning a mask plate with a substrate and a method for manufacturing a color filter substrate. Background technique [0002] A Liquid Crystal Display (LCD for short) has the characteristics of small size, light weight, low power consumption, and low radiation, and has been widely used in various electronic devices. In order to manufacture a liquid crystal display device, it is necessary to manufacture a color filter substrate. In the exposure process of the film layer of the color filter for manufacturing the color filter substrate, a four-point positioning method is often used to align the mask plate and the glass substrate, that is, the alignment mark at the four corners of the alignment mask plate and the glass substrate at the four corners alignment marks to align the reticle and glass substrate. [0003] Taking the sub-pixels included in e...

AI Technical Summary

Problems solved by technology

Since the three substrate alignment marks on the glass substrate have the same appearance, and the three mask alignment marks on the reticle have the same appearance, there is a situation of right and wrong alignment, such as aligning the red sub-pixel mask with the green Sub-pixel substrate alignment, mask plate and substrate alignment are inefficient, which in turn reduces production efficiency

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