Supercharge Your Innovation With Domain-Expert AI Agents!

Soundproof cover for charged-particle beam device, and charged-particle beam device

A technology of charged particle wires and charged particles, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve problems such as hindering the dust resistance of clean rooms

Inactive Publication Date: 2014-10-01
HITACHI HIGH-TECH CORP
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, a charged particle beam device is generally used in a clean room, so there are cases in which a problem arises due to the dust-generating property caused by droplets of these organic materials that interferes with the dust-proof performance of the clean room.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Soundproof cover for charged-particle beam device, and charged-particle beam device
  • Soundproof cover for charged-particle beam device, and charged-particle beam device
  • Soundproof cover for charged-particle beam device, and charged-particle beam device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] In this example, use Image 6 and even Figure 7 An example of a soundproof enclosure structure capable of effectively reducing standing sound waves in the enclosure and a charged particle beam device having this structure will be described.

[0050] Image 6 is an example of a cross-sectional view of the charged particle beam device of this embodiment and its soundproof cover, in which the perspective view of the part indicated by the dotted line is represented by Figure 7 express. exist Image 6 In the illustrated embodiment, with respect to the inner surface of the cover, one side of the cylindrical hollow portion 210 is closed and the other is open, so that the opening 211 of the cylindrical hollow portion 210 is located at the antinode of the sound pressure of the standing acoustic wave. The top and bottom of the inside of the cover and the center portion in the vertical direction of the cover are provided on the inner surface of the side wall of the soundproo...

Embodiment 2

[0061] In this example, use Figure 11 An example of a structure capable of suppressing a standing sound wave in the second vertical mode or the first horizontal mode by providing a sound absorption tube not only on the side but also on the inner surface or bottom surface of the top plate will be described. Figure 11 In order to effectively utilize the inner surface or the bottom surface of the ceiling of the soundproof enclosure 200, the Image 6 The longitudinal direction of the cylinder of the cylindrical hollow part 210 of the illustrated embodiment 1 is arranged in the cover lateral direction instead of along the cover height direction within the cover. In this way, in addition to effectively utilizing the inner surface or the bottom surface of the top plate of the soundproof enclosure 200, it can help to reduce the first mode in the horizontal direction inside the enclosure although it is small, and it is expected that the image noise of the first embodiment can be furt...

Embodiment 3

[0063] Next, as another example, using Figure 12 The format combined with the multi-well plate will be described. Figure 12 is expressed in Image 6 The shown example is an example in which a perforated plate is provided in the opening 211 of the cylindrical hollow part 210 having the structure explained in the first embodiment. By disposing the perforated plate in the opening in this way, the ease of movement of the air vibrating in the opening can not be hindered, so that the sound absorption can be exhibited even in a cylindrical hollow part with a shorter length than the case where the perforated plate is not provided. Effect. Thereby, even when the cylindrical hollow part cannot be provided in the area around the inner surface of the cover, the same sound absorbing effect can be exhibited. In addition, when the opening ratio of the perforated plate is extremely small, the length of the cylindrical hollow portion can be shortened, thereby setting the opening direction...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The purpose of the present invention is to provide a soundproof cover and a charged-particle beam device wherein it is possible to reduce the size and to inhibit damages to an image caused by a specific frequency. In order to achieve said purpose, the present invention provides a soundproof cover for surrounding a charged-particle beam device, the soundproof cover being provided with a hollow space formation member for forming a cylindrical body having a wall surface along the inner wall of the soundproof cover, wherein one end of the cylindrical body formed by means of the hollow space formation member is open and the other end of the cylindrical body is closed. The present invention also provides a charged-particle beam device surrounded by said soundproof cover.

Description

technical field [0001] The present invention relates to a soundproof cover used in a charged particle beam device and the like, and particularly to a soundproof cover and a charged particle beam device capable of suppressing the influence of sound of a specific frequency. Background technique [0002] In charged particle beam devices such as electron microscopes that use electron beams to observe microstructures at high resolution, image noise due to microscopic vibrations or sounds from the outside becomes conspicuous as the resolution increases. Therefore, in order to prevent image noise from being irradiated with ambient sound, a soundproof cover is provided to cover the device from the outside as means for blocking the transmission of sound waves irradiated to the device. [0003] In consideration of the diffraction properties of sound waves and in view of operability or cost reduction, the soundproof cover is usually formed into a hexahedral structure with up and down, ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/09H01J37/16
CPCH01J2237/0216G10K11/172H01J37/26H01J37/16G10K11/16H01J37/20
Inventor 武藤大辅菊池秀树上田浩大长冲功高野靖
Owner HITACHI HIGH-TECH CORP
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com