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Mems proof mass with split z-axis portions

A quality block and central part technology, applied in the direction of measuring device, acceleration measurement, multi-dimensional acceleration measurement, etc., can solve the problems of sensor accuracy and acceleration, etc.

Active Publication Date: 2014-10-08
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As the size of such sensors becomes smaller and the required sensitivity increases, small-scale stresses on certain components of the accelerometer can detract from the sensor's accuracy

Method used

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  • Mems proof mass with split z-axis portions
  • Mems proof mass with split z-axis portions
  • Mems proof mass with split z-axis portions

Examples

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Embodiment Construction

[0012] Figure 1A An example of a proof-mass 100 including a divided z-axis portion is broadly illustrated. In some examples, proof-mass 100 may be used in a sensor to detect acceleration. In some examples, proof-mass 100 may be micromachined from device layer materials. For reference purposes herein, the major surfaces of the proof-mass lie in x-y planes, and the z-axis direction may be normal to each x-y plane. In some examples, the sensor may include a chip scale package, where the proof-mass 100 may be located between the via layer and the cap layer. In some examples, the device layer may be located within a vacuum cavity between the cap layer and the via layer. The cavity accommodates out-of-plane movement of portions of the proof-mass 100 . In some examples, the proof-mass 100 may include a central portion 101 and a first z-axis portion 102 and a second z-axis portion 103 . In some examples, central portion 101 may include anchor region 104 . In some examples, the a...

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PUM

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Abstract

This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.

Description

[0001] Cross References to Related Applications [0002] This application claims U.S. Patent Application Serial No. 13 / 363,537, entitled "MEMS PROOF MASS WITH SPLIT Z-AXIS PORTIONS," filed February 1, 2012 The benefit of priority of this patent application is incorporated herein by reference in its entirety. [0003] This application is related to the international application No.PCT / US2011 entitled "MICROMACHINED MONOLITHIC 3-AXIS GYROSCOPE WITH SINGLE DRIVE" (micromechanical monolithic three-axis gyroscope with single drive) submitted to Acar on September 18, 2011 Related to / 052065, this international application claims the U.S. Provisional Application for "MICROMACHINED MONOLITHIC 3-AXIS GYROSCOPE WITH SINGLE DRIVE" (Micromachined Monolithic Three-Axis Gyroscope with Single Drive) awarded to Acar on September 18, 2010 The benefit of priority of patent application serial number 61 / 384,245, and this application and the title of "MICROMACHINED 3-AXIS ACCELEROMETER WITH A SINGL...

Claims

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Application Information

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IPC IPC(8): G01C19/5733G01P15/125G01P15/18
CPCG01P2015/0848G01P2015/082G01P15/18G01P2015/0811G01C19/5733G01P15/125
Inventor C·阿卡
Owner QST CORP
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