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A method for mechanically processing complex nanostructures in the same scribing direction of an AFM probe

A directional mechanical and nano-structure technology, applied in the direction of micro-structure technology, micro-structure device, manufacturing micro-structure device, etc., can solve the problems of inconsistent processing structure depth and processing quality, and achieve good processing quality consistency, simple processing method, Simple to use effects

Active Publication Date: 2015-12-02
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of inconsistency in processing structure depth and processing quality in the prior art, the present invention provides a method for mechanically processing complex nanostructures in the same scribing direction of the AFM probe

Method used

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  • A method for mechanically processing complex nanostructures in the same scribing direction of an AFM probe
  • A method for mechanically processing complex nanostructures in the same scribing direction of an AFM probe

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specific Embodiment approach 1

[0019] Specific implementation mode one: as figure 1 As shown, a device for mechanically processing complex nanostructures in the same scribing direction provided by an AFM probe in this embodiment includes: AFM (Q-Scope250; Ambios Company, USA) 1, a processed sample 2, a manual two-dimensional adjustment table ( Sigma, Japan)3, precision spindle (ABRS-150MP, Aerotech, USA)4 and two-dimensional high-precision positioning platform (M511.HD; PICompany, Germany)5. In the picture, the processed sample 2 is fixed on the manual two-dimensional adjustment table 3, the bottom of the manual two-dimensional adjustment table 3 is connected to the upper end of the precision spindle 4, and the lower end of the precision spindle 4 is connected to the two-dimensional high-precision positioning platform 5, two-dimensional The base of the high precision positioning platform 5 is fixedly connected on the sample stage of AFM1. Both the precision spindle 4 and the two-dimensional high-precision ...

specific Embodiment approach 2

[0022] Specific embodiment 2: This embodiment provides a method for mechanically processing complex nanostructures in the same scribing direction of an AFM probe, including the following steps:

[0023] 1. First, carry out rough centering on the precision spindle, and roughly determine the relative position of the AFM probe and the center of rotation of the precision spindle; then apply a certain load to the AFM probe and keep it still, control the precision spindle to rotate 360°, use the AFM The three-dimensional topography detection function obtains the surface topography map after nano-processing, and obtains the rotation center of the precision spindle by extracting the circular trajectory image of the surface topography map, so as to realize the precise comparison between the contact point of the AFM probe and the sample surface and the center of rotation Location.

[0024] 2. Determine the processing and scoring position of the AFM needle tip, and control the position m...

specific Embodiment approach 3

[0027] Specific implementation mode three: as figure 2 As shown, this embodiment provides a method for mechanically processing complex nanostructures in the same scribing direction of the AFM probe, and the specific steps are as follows:

[0028] Step 1: Align the center and determine the relative position of the AFM probe press-in position and the center of rotation of the precision spindle; it is divided into two methods: coarse alignment and fine alignment.

[0029] (1) Coarse centering

[0030] The processed sample is fixed on the manual two-dimensional adjustment table, and a cross-shaped mark is made on the surface of the processed sample. Through observation under an optical microscope, the manual two-dimensional adjustment table is used to roughly adjust the center of the cross-shaped mark to the precision spindle rotation center location nearby. At this time, the AFM probe is close to the sample surface, and the AFM auxiliary optical microscope is used to clearly s...

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Abstract

The invention discloses a device and method for same-direction etching and machining of a complicated nanostructure based on an AFM probe. The device for same-direction etching and machining of the complicated nanostructure based on the AFM probe comprises an AFM, a manual two-dimensional adjustment table, a precise main shaft and a two-dimensional high-precision positioning platform, wherein the bottom of the manual two-dimensional adjustment table is connected with the upper end of the precise main shaft, the lower end of the precise main shaft is connected with the two-dimensional high-precision positioning platform, and the two-dimensional high-precision positioning platform is fixedly connected to a sample table of the AFM. According to the device and method for same-direction etching and machining of the complicated nanostructure based on the AFM probe, the machining advantages of the AFM are utilized, the problem that machining results are affected due to the fact that the geometrical shape of the AFM probe is not in full symmetry is solved, and same-direction machining and etching are achieved based on the AFM probe. The machining method is simple, a complicated machining system is not needed, operation is easy, and a nanostructure with the precision reaching the nanometer grade can be obtained. Same-direction nanometer etching and machining are achieved based on the AFM probe, and the method has the advantage that structures obtained according to the method are uniform in machining depths and uniform in machining quality.

Description

technical field [0001] The invention belongs to the field of micro-nano structure processing, and relates to a method for mechanically processing complex nano-structures in the same marking direction of an AFM probe. Background technique [0002] With the rapid development of nanoscience and technology, complex nanostructures with high precision have a wide demand in many fields, such as nanofluidic biochips to enable biomolecules to perform biotransport, bioseparation, and biodetection; nanoscale sensors can detect The weight of a single biomolecule; an elastomeric nanochannel device to control the DNA translocation process; a nanochannel device to transport pharmaceuticals. For the processing of the above-mentioned structures, the processing methods currently used are mainly traditional nano-processing methods such as traditional photolithography, focused ion beam processing, electron beam processing, and laser processing. However, expensive processing equipment, complicat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
Inventor 闫永达于博文耿延泉胡振江赵学森
Owner HARBIN INST OF TECH
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