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Vibration-resistant accelerometer structure

An acceleration sensor and spring structure technology, applied in the MEMS field, can solve problems such as dirty vibration modes, difficult signals and errors, and interference signals

Active Publication Date: 2017-05-17
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] As a result, the structure is capable of mechanical vibration in several directions, and transients and relatively small vibrations can be undesirably associated with the vibration mass causing errors
The motion can also disturb the desired signal, making it more difficult to distinguish the signal from the error, i.e. the vibration mode is not clean

Method used

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  • Vibration-resistant accelerometer structure
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Embodiment Construction

[0019] The following examples are exemplary. Although this specification may refer to "an" embodiment, "an" embodiment, or "some" embodiments, this does not necessarily mean that each such reference is to the same embodiment, or that a feature is only applicable to a single embodiment . Single features of different embodiments may be combined to provide a further embodiment.

[0020] Features of the invention will be illustrated using simple examples of sensor structures in which various embodiments of the invention may be implemented. Only elements relevant for explaining the embodiment are described in detail. Various implementations of the inventive methods and apparatus include elements that are generally known to those skilled in the art and that may not be specifically described herein.

[0021] In the construction of a vibrating mass supported by a rotating spring, the relevant resonant frequency f res And the moment of inertia J depends on the distance of the vibra...

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Abstract

A MEMS structure comprising an anchor (1), a spring (2) and a vibration mass (3), the vibration mass (3) being suspended to the anchor (1) by the spring to rotate around Axes pivot. By including in the MEMS structure a spring structure (2, 4, 6) extending from the seismic mass (3) to the anchor (1), errors from unwanted vibration modes are reduced. The spring structure (2, 4, 6) comprises a side arm (4) connected to the vibration mass (3) or the anchor (1). at least a part of said spring structure (2, 4, 6) is formed by a side arm (4) extending in said spring structure in a direction parallel to said rotational axis of said vibration mass; and said at least a part is connected to one end of the spring (2).

Description

technical field [0001] The present invention relates generally to MEMS (Micro-Electro-Mechanical-System: Micro-Electro-Mechanical-System) technology, but more particularly to improved MEMS structures as defined in the preambles of the independent claims. The present invention also relates to acceleration sensors, acceleration sensor matrices, devices and systems comprising such improved MEMS structures. Background technique [0002] Sensing the acceleration of a body to provide a signal dependent on the dynamic state of said body under the influence of an applied force is a widely used method for detecting the motion and orientation of a body. To achieve this, various sensors can be used, but MEMS structures are suitable for many applications because of their small size. In microelectronics, increasing demands have made it possible to develop better and better structures to meet the purposes encountered in many fields, such as related to vehicles, household appliances, clot...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/125
CPCG01P15/125G01P2015/0831G01P15/08
Inventor 维勒-佩卡·吕特克宁
Owner MURATA MFG CO LTD