Stripping composition for color photoresists and organic insulating films
A technology of organic insulating film and color photoresist, which is applied in the direction of photosensitive material processing, etc., can solve the problem of not being able to remove color photoresist and organic insulating film at high speed at the same time, and the ability to remove color photoresist becomes poor.
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[0024] Hereinafter, the present invention will be described in detail.
[0025] The invention provides a stripping composition for color photoresists and organic insulating films. Based on the total weight of the stripping composition, the stripping composition includes: 1-10wt% quaternary ammonium compound; 40-80wt% pole Sexual solvent; 1~20wt% alkylamine; 1~10wt% by the amine compound shown in formula 1 or formula 2 below; 0.001~1wt% inorganic base or its salt; And, the water of 1~40wt% :
[0026] [Formula 1]
[0027]
[0028] Among them, R 1 is C 1 ~C 6 chain alkoxy or cyclic alkoxy, and the alkoxy can be C 1 ~C 6 The chain alkyl or cyclic alkyl is substituted or the alkoxy can be C 1 ~C 3 Alkoxy substitution, R 2 and R 3 each independently hydrogen or C 1 ~C 6 chain alkyl or cyclic alkyl, and n is an integer of 1 to 4,
[0029] [Formula 2]
[0030]
[0031] where A is O, S or N, and R 1 Yes: Hydrogen, unsubstituted C 1 ~C 20 Alkyl or C substituted by...
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