Vertical processing method and device for large-aperture high-steep space optical aspheric mirror

Abstract

A vertical type processing method and an apparatus for a large-aperture high-gradient space optical aspheric reflector are disclosed, relate to the field of optical processing, and solve the problems that conventional contact type processing for an aspheric reflector is low in processing efficiency, high in cost and low in precision. The processing method comprises: firstly introducing cooling water into a radiofrequency coil, introducing high-purity argon into a middle pipe, and introducing high-purity argon into an outer pipe; adjusting the radiofrequency power and applying to the radiofrequency coil; switching on a high-voltage Tesla ignition coil to generate a high-voltage electric spark and generating electron in a quartz torch pipe through induction and breaking down high-purity argon, and igniting plasma to form a high-temperature plasma torch; introducing a working gas and high-purity oxygen into a central pipe, so as to enable the working gas to be excited by the high-temperature plasma torch to form an active group; and controlling a mechanical arm to move along a track and drive a plasma generator to move on the surface of the aspheric reflector, so as to enable the ejected active group and the aspheric reflector material to have a chemical reaction and further to generate a volatile gaseous substance. The method is performed under a normal-pressure condition, the cost is low, the volume of the apparatus is small, and the removal rate is relatively high.

Description

technical field [0001] The invention relates to the technical field of optical processing, in particular to a vertical processing method and device for a large-diameter high-steep space optical aspheric reflector. Background technique [0002] In the process of optical inspection, the detection position of the mirror is mostly vertical detection. This state is different from the flat processing state. Due to the influence of gravity, the surface shape of the mirror changes. This phenomenon occurs in large-diameter and high-steep mirrors. It is particularly prominent in the above, it is the surface shape change caused by the inconsistency of the processing and testing state, which reduces the convergence efficiency of processing. If it is processed by the CNC small grinding head method of the traditional contact type granular abrasive, it is basically impossible to adopt the vertical processing method from the technical point of view. For the ion beam process of non-contact ...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of low processing efficiency, high cost, and low precision in the existing contact processing methods and devices of aspheric mirrors, the present invention provides a non-contact processing method under normal pressure conditions that can achieve stable removal. Vertical processing method and device for large-aperture high-steep space optical aspheric mirror with high function and high processing efficiency

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